From shott at snf.stanford.edu Wed Sep 1 07:40:03 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 1 Sep 2010 07:40:03 -0700 Subject: Shutdown tylan6 SNF 2010-09-01 07:40:02: Problems with thermal plug at door end ... Message-ID: I retracted the cantilever a certain distance to see if I could learn more about why we are having unusual smoking problems on the POCl3 tube. While I can't guarantee that what I found is necessarily the cause of these problems, they are clearly not correct and need to be addressed: 1. The back end of the big thermal plug closest to the door is raised up about 1 cm because it is sitting on a big "wad" of P2O5. It is sitting sufficiently high that the thermal is scraping against the top of the tube when it is inserted/retracted. Moreover, this must be greatly altering the flow of gas around the thermal plug so that is is not uniform. 2. The big thermal plug is too close to the door .... it is sitting so that the body of the plug is largely blocking the exhaust hole in the side of the tube. It needs to be pushed further toward the source end so that there is a largely unobstructed cavity between the door and the plug that extends at least as deep as the exhaust hole. If I look at tylan 5, I can see that is has one of the little baffle sections between the plug and the door ... but that the big plug there is pushed far enough in along the cantileverer that there is a largely open cavity between the plug and the exhaust port. Having the big thermal plug sitting in front of the exhaust hold cannot be correct and must be influencing the way that the gas from the tube is getting scavenged. Here is what I believe needs to happen. 1. Turn off tylan6 and determine whether we only need to pull and clean the cantilevers or whether we want to clean the entire tube. 2. Check any assembly drawings that show the position of the plug relative to the end of the door and, in particular, relative to the exhaust hole. 3. Reassemble the system to ensure that the plug is deeper than the exhaust hole when it is inserted in the tube. 4. Make sure that the cantilver is nicely centered and that there is largely uniform spacing around the plug so that there is no scraping. 5. Run test runs at both 850C and 1000C (or whatever is the maximum allowed predep temperature) to look for evidence of smoking. Thanks, John From seymour at snf.stanford.edu Thu Sep 2 15:00:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Sep 2010 15:00:44 -0700 Subject: Comment tylan6 SNF 2010-09-02 15:00:43: tube pull and clean completed. Message-ID: tomorrow we will test the tube after a new baffle orientation. From tberg at snf.stanford.edu Thu Sep 9 06:06:41 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Sep 2010 06:06:41 -0700 Subject: Comment tylan6 SNF 2010-09-09 06:06:40: ran pocl3850 Message-ID: ran pocl3850 with no vapor, will test further From maurice at snf.stanford.edu Tue Sep 21 09:53:12 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Sep 2010 09:53:12 -0700 Subject: Comment tylan6 SNF 2010-09-21 09:53:11: POCl test Message-ID: POCL775 00:30:00 looking for smoke and smells joey doll wafers From maurice at snf.stanford.edu Tue Sep 21 11:47:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Sep 2010 11:47:25 -0700 Subject: Comment tylan6 SNF 2010-09-21 09:53:11: POCl test Message-ID: POCL775 00:30:00 - After 5 minutes of deposition we (Linda W, Mahnaz, Joey and I) could smell HCl at the front of the tube and the "sweet" smell near wbdiff. - We aborted the tube after ~8 minutes of dep. - There is white deposition at the 3 o'clock position (as you look into the tube) at the mouth of the tube. The door may need an adjustment. From jcdoll at snf.stanford.edu Wed Sep 22 21:05:58 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Wed, 22 Sep 2010 21:05:58 -0700 Subject: Problem tylan6 SNF 2010-09-22 21:05:57: Timeline for door seal fix? Message-ID: Please provide ETA for working door seal. Tool downtime is going on one month, and at least five users (that I know of) waiting on tylan6 in order to proceed with their rest of their processes. From maurice at snf.stanford.edu Thu Sep 23 10:03:19 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Sep 2010 10:03:19 -0700 Subject: Problem tylan6 SNF 2010-09-22 21:05:57: Timeline for door seal fix? Message-ID: I don't expect tylan 6 up this week. Ray and Jim H. looked at the door seal yesterday and have some ideas on the adjustments that they want to make. Once the adjustment is made we will heat the tbe back up and run another test. Today the priority is Tylan BPSG, Epi2 and tylan nitride. From maurice at snf.stanford.edu Thu Sep 23 10:03:52 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Sep 2010 10:03:52 -0700 Subject: Comment tylan6 SNF 2010-09-23 10:03:51: tylan6 update Message-ID: I don't expect tylan 6 up this week. Ray and Jim H. looked at the door seal yesterday and have some ideas on the adjustments that they want to make. Once the adjustment is made we will heat the tbe back up and run another test. Today the priority is Tylan BPSG, Epi2 and tylan nitride.