From gsosa at snf.stanford.edu Sat Mar 3 13:36:58 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 3 Mar 2012 13:36:58 -0800 Subject: Shutdown tylan6 SNF 2012-03-03 13:36:57: Shutdown 3/3 Message-ID: Need to investigate cause of TGO alarm. From popomoo at snf.stanford.edu Sat Mar 3 14:42:09 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 3 Mar 2012 14:42:09 -0800 Subject: Problem tylan6 SNF 2012-03-03 14:42:09: white chunk dropped on the wafer Message-ID: During my process, there was a toxic gas alarm and the machine was shut down.The tube was supposed to come out at 1:45pm, and I came back to the lab at 1:40pm. However, the tube came out already, and a big white chunk stuck onto my wafer. I don't know what it is, and I leave it near the furnace. From seymour at snf.stanford.edu Tue Mar 6 14:35:37 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 6 Mar 2012 14:35:37 -0800 Subject: Comment tylan6 SNF 2012-03-06 14:35:36: tube needs to be [ulled and cleaned. Message-ID: removed t/c and sheath. removed source injector and back plate. From seymour at snf.stanford.edu Fri Mar 9 06:53:47 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Mar 2012 06:53:47 -0800 Subject: Comment tylan6 SNF 2012-03-09 06:53:47: tube cleaning complete Message-ID: back together and heated up. exhaust duct section replaced. From maurice at snf.stanford.edu Fri Mar 9 14:12:03 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Mar 2012 14:12:03 -0800 Subject: Comment tylan6 SNF 2012-03-09 14:12:03: POCL3 status Message-ID: POCl3 canister off. Tube shutdown. TGO sensor off. From tberg at snf.stanford.edu Thu Mar 22 10:50:59 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Mar 2012 10:50:59 -0700 Subject: Shutdown tylan6 SNF 2012-03-03 13:36:57: Shutdown 3/3 Message-ID: yellow to allow POCl3 run with staff observation From tberg at snf.stanford.edu Thu Mar 22 10:51:20 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Mar 2012 10:51:20 -0700 Subject: Problem tylan6 SNF 2012-03-03 14:42:09: white chunk dropped on the wafer Message-ID: cleaned tube From tberg at snf.stanford.edu Thu Mar 22 10:52:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Mar 2012 10:52:07 -0700 Subject: Problem tylan6 SNF 2012-03-22 10:52:06: yellow to run Message-ID: yellow to run with staff observation From maurice at snf.stanford.edu Thu Mar 22 11:18:29 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Mar 2012 11:18:29 -0700 Subject: Problem tylan6 SNF 2012-03-22 11:18:29: not boating out Message-ID: clchang6 reports that tube is not boating out. From seymour at snf.stanford.edu Thu Mar 22 11:55:10 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 22 Mar 2012 11:55:10 -0700 Subject: Shutdown tylan6 SNF 2012-03-22 11:55:10: tube moved too far back Message-ID: cannot adjust door in flag back far enough to make door in sensor then stop. It goes past the door in and then when opening it makes the sensor and the slow in push starts. Cooling down tube to allow work on back to resecure the tube position holders. From seymour at snf.stanford.edu Fri Mar 23 12:01:47 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Mar 2012 12:01:47 -0700 Subject: Shutdown tylan6 SNF 2012-03-22 11:55:10: tube moved too far back Message-ID: repositioned tube and adjusted door flag. Ran pocl3 fopr 25 mins and no detection on sensor and no vapors escaped from front of furnace tube From tberg at snf.stanford.edu Tue Mar 27 13:43:23 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Mar 2012 13:43:23 -0700 Subject: Problem tylan6 SNF 2012-03-22 11:18:29: not boating out Message-ID: ray resolved From maurice at snf.stanford.edu Thu Mar 29 13:45:41 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Mar 2012 13:45:41 -0700 Subject: Comment tylan6 SNF 2010-10-29 15:33:24: P1000SLO created Message-ID: logged From maurice at snf.stanford.edu Thu Mar 29 13:45:51 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Mar 2012 13:45:51 -0700 Subject: Comment tylan6 SNF 2012-03-06 14:35:36: tube needs to be [ulled and cleaned. Message-ID: logged From maurice at snf.stanford.edu Thu Mar 29 13:46:01 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Mar 2012 13:46:01 -0700 Subject: Comment tylan6 SNF 2012-03-09 06:53:47: tube cleaning complete Message-ID: logged