From sanli at piezo.Stanford.EDU  Wed Jul  4 17:58:39 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Wed, 4 Jul 2001 17:58:39 -0700 (PDT)
Subject: tylan 6 status
Message-ID: <Pine.GSO.4.31.0107041752310.29266-100000@piezo.Stanford.EDU>


Hi,
Today I ran POCL1000 on tylan6. When you look at the tube status on tycom
it says that DNTLK is OFF. However, it continues processing. The question
was, "Does it really turn on the dopant gas flow and dope?" The answer is
"Yes". I measured a resistivity of 1.98 Ohms/sqr on one of the wafers
which had a resistivity of 135 Ohms/sqr before doping. So, tylan6 is
running OK, just don't pay attention to the DNTLK OFF sign on tycom.

Sanli