From gyama at snf.stanford.edu  Wed Feb 20 12:37:16 2002
From: gyama at snf.stanford.edu (Gary Yama)
Date: Wed, 20 Feb 2002 12:37:16 -0800
Subject: Phos doped poly
Message-ID: <3C7408FC.AFB27BA7@snf.stanford.edu>

Hello,

I have some wafers with 2um thermal ox and 5000A poly.  I would like to N-type dope the poly to 10e17 - 10e18.

Does anyone have information on the recipe used and the subsequent anneal step used to get to that level?

Thanks,

Gary