Phos doped poly

Gary Yama gyama at snf.stanford.edu
Wed Feb 20 12:37:16 PST 2002


Hello,

I have some wafers with 2um thermal ox and 5000A poly.  I would like to N-type dope the poly to 10e17 - 10e18.

Does anyone have information on the recipe used and the subsequent anneal step used to get to that level?

Thanks,

Gary




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