From maurice at stanford.edu  Thu Sep 23 10:06:52 2010
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 23 Sep 2010 10:06:52 -0700
Subject: tylan6 update
In-Reply-To: <20100923170352.6E843467A@smtp-unencrypted.stanford.edu>
References: <20100923170352.6E843467A@smtp-unencrypted.stanford.edu>
Message-ID: <4C9B892C.6000403@stanford.edu>

  updated on coral

On 9/23/2010 10:03 AM, maurice at snf.stanford.edu wrote:
> I don't expect tylan 6 up this week.  Ray and Jim H. looked at the door seal yesterday and have some ideas on the adjustments that they want to make.  Once the adjustment is made we will heat the tube back up and run another test.  Today the priority is Tylan BPSG, Epi2 and tylan nitride.
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Wed Sep 29 11:25:11 2010
From: maurice at stanford.edu (maurice)
Date: Wed, 29 Sep 2010 11:25:11 -0700
Subject: Teos2/POCl update
Message-ID: <4CA38487.4050309@stanford.edu>

Ray has gotten Teos and tylan nitride back up (yipee!) and now can move 
over to Teos2 and POCl.

Teos2 has a problem somewhere in the door sensor electrical.  If you 
bump the load station deck it changes whether the system thinks the door 
is open or closed.  It is not a switch problem and Ray has swapped out 
the electrical board.  It seems like it is somewhere in between those 
two points.

Tylan6 has a door that is not lining up with the tube.  The loader will 
be pulled apart, a new "o" ring put in that lines up with the tube and 
then the loader reassembled. We'll start test again after that.

We will update you when we have more information.