tylan6 update

maurice stevens maurice at stanford.edu
Thu Sep 23 10:06:52 PDT 2010

  updated on coral

On 9/23/2010 10:03 AM, maurice at snf.stanford.edu wrote:
> I don't expect tylan 6 up this week.  Ray and Jim H. looked at the door seal yesterday and have some ideas on the adjustments that they want to make.  Once the adjustment is made we will heat the tube back up and run another test.  Today the priority is Tylan BPSG, Epi2 and tylan nitride.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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