From wangss at stanford.edu  Fri Nov 18 17:44:48 2011
From: wangss at stanford.edu (Shasha Wang)
Date: Fri, 18 Nov 2011 17:44:48 -0800 (PST)
Subject: dopant concentration and resistivity
Message-ID: <617361252.210574.1321667088110.JavaMail.root@zm06.stanford.edu>

Hi all,

I was wondering if any of you have tested the poly film's resistivity after process. I plan to use POCL1000 and was wondering how long I need to get a resistivity around 20 Ohm*cm for a 2um film.

thanks,
Shasha