dopant concentration and resistivity

Shasha Wang wangss at stanford.edu
Fri Nov 18 17:44:48 PST 2011


Hi all,

I was wondering if any of you have tested the poly film's resistivity after process. I plan to use POCL1000 and was wondering how long I need to get a resistivity around 20 Ohm*cm for a 2um film.

thanks,
Shasha



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