From gaul at snf.stanford.edu Tue Aug 29 17:41:28 2000 From: gaul at snf.stanford.edu (Keith Gaul) Date: Tue, 29 Aug 2000 17:41:28 -0700 (PDT) Subject: Problem tylanbpsg: failed twice in the gross leak check, and pump11 as well Message-ID: So why is this written up as a problem and not a shutdown? Here is the status of the tube now, anyone see a problem? TUBE STATUS PROCID ET STEP TIME-TO-GO STEP ET 011 RUN LTO400 00:16:29 0020 00:04:40 00:15:20 OUTPUTS RELAYOUT RELAYIN INPUTS (B,b=BAD T/C) TCU% SIH4 = 0.0 SIH4 = OFF DNTLK = ON TEMPL = G 250.0 13.78 PH3 = 0.0 PH3 = OFF CCIN2 = OFF TEMPC = G 250.0 77.81 O2 = 0.0 O2 = OFF BNTLK = ON TEMPS = G 250.0 24.00 BCL3 = 0.0 BCL3 = OFF VNTLK = ON N2PURG = 100.1 N2PURG = ON GNTLK = ON PRCPR = 0.0 PRCPR = OFF PRCPR = OFF SPEED = 25.0 VACUUM = ON BLOUT = OFF SP1 = 0.0 AUX1 = OFF BLAUTO = ON TEMPL = 400.0 AUX2 = OFF SIH4 = G 0.0 TEMPC = 400.0 AUX3 = OFF PH3 = G 0.0 TEMPS = 400.0 AUX4 = OFF O2 = G 0.0 AUX5 = OFF BCL3 = G 0.0 AUX6 = OFF N2PURG = G 120.8 AUX7 = OFF PRCPR = G 2000.0 LOAD = ON UNLOAD = OFF TASK COMPLETE On 29 Aug 2000 sanli at snf.stanford.edu wrote: > I was running PSG400. In the first run, it alarmed several times, but did the deposition. Then, I was doing my 2nd run when the gross leak check failed, and process aborted. I tried again, and it failed again. I gave up, and now I'm trying to pump it down. But, it keeps on alarming. >