From dtchang at snf.stanford.edu Wed Aug 1 06:43:58 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Aug 1, 2001 6:43:58 PM Subject: Problem tylanbpsg 2001-08-01 18:43:57: metal vacuum wand Message-ID: tip of metal vacuum wand is broken... From gladys at snf.stanford.edu Thu Aug 2 10:59:53 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 2, 2001 10:59:53 AM Subject: Problem tylanbpsg 2001-08-01 18:43:57: metal vacuum wand replaced 8/2, gladys Message-ID: From mcvittie at snf.stanford.edu Sun Aug 5 08:58:29 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 5, 2001 8:58:29 PM Subject: Shutdown tylanbpsg 2001-08-05 20:58:25: SiH4 MFRC Calibration Message-ID: I have turned off the heaters and drained the SiH4. Tomorrow morning, we will test the SiH4 MFC using N2. The tube should be back up in the afternoon. Thanks, Jim McVittie From seymour at snf.stanford.edu Tue Aug 7 07:13:52 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 7, 2001 7:13:52 AM Subject: Shutdown tylanbpsg 2001-08-05 20:58:25: SiH4 MFRC Calibration Message-ID: sih4 calibration complete. tube is up to temperature. up to use. From gladys at snf.stanford.edu Tue Aug 7 02:49:14 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 7, 2001 2:49:14 PM Subject: Shutdown tylanbpsg 2001-08-07 14:49:13: tylanbpsg:shutdown for cleaning Message-ID: From seymour at snf.stanford.edu Fri Aug 10 08:27:55 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 10, 2001 8:27:55 AM Subject: Shutdown tylanbpsg 2001-08-07 14:49:13: tylanbpsg:shutdown for cleaning Message-ID: tube cleaned. Pump line from tube to pump cleaned. passed cold and hot leak check. coated with poly. From seymour at snf.stanford.edu Fri Aug 10 08:29:00 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 10, 2001 8:29:00 AM Subject: Shutdown tylanbpsg 2001-08-10 08:28:59: clean completed needs characterization Message-ID: thickness and uniformity test needed From latta at snf.stanford.edu Fri Aug 10 02:26:49 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 10, 2001 2:26:49 PM Subject: Problem tylanbpsg 2001-08-10 14:26:47: Backfill alarm Message-ID: meant to mention this before, the alarm during backfill sounds. I think it calls for 750sccm, but delivers 799, hence the alarm, near as I can tell.... From seymour at snf.stanford.edu Tue Aug 14 03:42:45 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 14, 2001 3:42:45 PM Subject: Problem tylanbpsg 2001-08-10 14:26:47: Backfill alarm Message-ID: alarm due to clogged injector From seymour at snf.stanford.edu Tue Aug 14 03:43:25 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 14, 2001 3:43:25 PM Subject: Shutdown tylanbpsg 2001-08-10 08:28:59: clean completed needs characterization Message-ID: thickness out of sped injector bad From seymour at snf.stanford.edu Tue Aug 14 03:44:51 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 14, 2001 3:44:51 PM Subject: Shutdown tylanbpsg 2001-08-14 15:44:49: being characterized at this time Message-ID: new injectors and another tube installed. From latta at snf.stanford.edu Tue Aug 14 05:14:02 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 14, 2001 5:14:02 PM Subject: Shutdown tylanbpsg 2001-08-14 15:44:49: being characterized at this time Message-ID: Passed uniformity check; Boat1 3453-3864A Boat2 3808-4025A Boat3 4340-4413A Boat4 4324-4556A From wliu at snf.stanford.edu Thu Aug 16 07:46:35 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Aug 16, 2001 7:46:35 AM Subject: Problem tylanbpsg 2001-08-16 07:46:34: scattered metallic particles found on cover and on wafers. Message-ID: after run completed and the boat came out, metallic particles/flakes were found scattered on cover and on some wafers. From seymour at snf.stanford.edu Thu Aug 16 03:31:04 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 16, 2001 3:31:04 PM Subject: Shutdown tylanbpsg 2001-08-16 15:31:04: tube and wafer carrier being cleaned Message-ID: From mcvittie at snf.stanford.edu Fri Aug 17 08:58:29 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 17, 2001 8:58:29 PM Subject: Shutdown tylanbpsg 2001-08-16 15:31:04: tube and wafer carrier being cleaned Message-ID: We did a undoped 20 min run. We got around 4000A in centers which is albout right. There where some particles small and large. We will send out detailed results later. jim From mcvittie at snf.stanford.edu Fri Aug 17 08:59:41 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 17, 2001 8:59:41 PM Subject: Problem tylanbpsg 2001-08-16 07:46:34: scattered metallic particles found on cover and on wafers. Message-ID: I think these particles where from the flaking of the poly coat. Jim From aaronp at snf.stanford.edu Sat Aug 18 05:00:39 2001 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Aug 18, 2001 5:00:39 PM Subject: Problem tylanbpsg 2001-08-18 17:00:38: outside tube seal partially out of place Message-ID: From seymour at snf.stanford.edu Wed Aug 22 08:11:44 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 22, 2001 8:11:44 AM Subject: Problem tylanbpsg 2001-08-18 17:00:38: outside tube seal partially out of place Message-ID: repositioned the seal on the door. From manjot at snf.stanford.edu Wed Aug 22 10:27:25 2001 From: manjot at snf.stanford.edu (manjot at snf.stanford.edu) Date: Aug 22, 2001 10:27:25 AM Subject: Problem tylanbpsg 2001-08-22 10:27:22: WHITE STREAKS ON WAFERS Message-ID: From beckwith at snf.stanford.edu Wed Aug 22 01:12:33 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Aug 22, 2001 1:12:33 PM Subject: Comment tylanbpsg 2001-08-22 13:12:33: my wafers came out clean...have not looked Message-ID: at them under the scope, but the look good my eyeball. There is white "stuff" on the edge of the tube and on the door seal again. From beckwith at snf.stanford.edu Wed Aug 22 01:40:34 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Aug 22, 2001 1:40:34 PM Subject: Comment tylanbpsg 2001-08-22 13:40:33: oxide is very non-uniform on each wafer Message-ID: here are the measurements, I only had 2 wafers: 10880 11052 10471 10576 10540 10489 10560 10449 10248 10249 Also, the growth rate seems to have increased from our previous runs. From mcvittie at snf.stanford.edu Fri Aug 24 12:07:04 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 24, 2001 12:07:04 AM Subject: Problem tylanbpsg 2001-08-24 00:07:01: Oxide Flakes and spots in dark field Message-ID: The oxide on the tube is starting to flake. We had a high leak rate (70 mt/min or about 3 sccm of air). On opening the tube wefound some oxide flakes on the door seal. I cleaned seal with iso. In dark field we found a non-uniform distribution of small bright spots. Under bright light with no magnification these spots showed up as streaks and hase. From seymour at snf.stanford.edu Sat Aug 25 07:35:47 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 25, 2001 7:35:47 AM Subject: Shutdown tylanbpsg 2001-08-25 07:35:46: Message-ID: From seymour at snf.stanford.edu Sat Aug 25 04:01:51 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 25, 2001 4:01:51 PM Subject: Shutdown tylanbpsg 2001-08-25 07:35:46: Message-ID: facilities ok From wliu at snf.stanford.edu Wed Aug 29 03:21:36 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Aug 29, 2001 3:21:36 AM Subject: Problem tylanbpsg 2001-08-29 03:21:35: pump not working Message-ID: shortly after pressing 'RUN' the alarm sounds...the pump doesn't appear to work. From seymour at snf.stanford.edu Wed Aug 29 07:13:40 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 29, 2001 7:13:40 AM Subject: Shutdown tylanbpsg 2001-08-29 07:13:39: Pump is seized Message-ID: the pump needs to be changed and the tube is near time to clean so I will do both From seymour at snf.stanford.edu Thu Aug 30 01:47:53 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 30, 2001 1:47:53 PM Subject: Problem tylanbpsg 2001-08-22 10:27:22: WHITE STREAKS ON WAFERS Message-ID: cleaned tube From seymour at snf.stanford.edu Thu Aug 30 01:48:09 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 30, 2001 1:48:09 PM Subject: Problem tylanbpsg 2001-08-24 00:07:01: Oxide Flakes and spots in dark field Message-ID: cleaned tube From seymour at snf.stanford.edu Thu Aug 30 01:48:23 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 30, 2001 1:48:23 PM Subject: Problem tylanbpsg 2001-08-29 03:21:35: pump not working Message-ID: replaced pump From seymour at snf.stanford.edu Thu Aug 30 01:49:10 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 30, 2001 1:49:10 PM Subject: Shutdown tylanbpsg 2001-08-29 07:13:39: Pump is seized Message-ID: replaced pump with a rebuilt one. Pulled and cleaned the tube. From seymour at snf.stanford.edu Thu Aug 30 01:51:12 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 30, 2001 1:51:12 PM Subject: Shutdown tylanbpsg 2001-08-30 13:51:12: Needs characterization Message-ID: the tube passed cold and hot leak check. The tube has been coated and is cooling down now. Needs thickness and uniformity. From latta at snf.stanford.edu Thu Aug 30 06:08:57 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 30, 2001 6:08:57 PM Subject: Shutdown tylanbpsg 2001-08-30 18:08:55: Temp too high during dep Message-ID: TEMPL = 490 with a big G TEMPC = 400 with a big H TEMPS = 475 with a big G Go figure. We'll need to do a test run at the actual temp of 400C. From latta at snf.stanford.edu Fri Aug 31 01:47:46 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 31, 2001 1:47:46 PM Subject: Shutdown tylanbpsg 2001-08-30 18:08:55: Temp too high during dep Message-ID: Check out run this am. Temp, pressures and flows ok. From latta at snf.stanford.edu Fri Aug 31 01:52:29 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 31, 2001 1:52:29 PM Subject: Shutdown tylanbpsg 2001-08-30 13:51:12: Needs characterization Message-ID: LTO400 run for 00:20:00. All parameters ok during run. Expected thickness 4000A. Thickness results, nanospec, mean given; Boat #1 3307A 3607A Boat #2 3927A 4147A Boat #3 3860A 3912A Boat #4 4362A 4245A All within-a-wafer readings 2%-4%.