From seymour at snf.stanford.edu Fri Jun 1 03:17:23 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 1, 2001 3:17:23 PM Subject: Shutdown tylanbpsg 2001-06-01 15:17:22: burnbox down Message-ID: From seymour at snf.stanford.edu Mon Jun 4 11:04:15 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2001 11:04:15 AM Subject: Shutdown tylanbpsg 2001-06-01 15:17:22: burnbox down Message-ID: the burnbox has been repaired tube is up From jawad at snf.stanford.edu Thu Jun 14 08:13:55 2001 From: jawad at snf.stanford.edu (jawad at snf.stanford.edu) Date: Jun 14, 2001 8:13:55 PM Subject: Problem tylanbpsg 2001-06-14 20:13:54: TMPL control bad Message-ID: I am using LTO450P. TMPL,TMPC and TMPS are set to be at 450C. Tube has very well controlled TMPC and TMPS around 450C however TMPL is not going above 410C even after 1 hour temp stabilization. In the status page controller shows that TMPL=410 is Good whereas it should show it to be Low. This huge temperature gradient on the front side of the tube may explainn 20% wafer-to-wafer variation on the non-metal side. Can you please take a look at the temperature controller. thank you very much. From gsarmien at snf.stanford.edu Mon Jun 18 10:05:23 2001 From: gsarmien at snf.stanford.edu (gsarmien at snf.stanford.edu) Date: Jun 18, 2001 10:05:23 AM Subject: Problem tylanbpsg 2001-06-14 20:13:54: TMPL control bad Message-ID: When using the LTO450P recipe, you need to HOLD it at the final temp sta step and wait for the temp to stabilize at at 450C before going to the dep step. Gladys From seymour at snf.stanford.edu Tue Jun 19 07:18:02 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 19, 2001 7:18:02 AM Subject: Shutdown tylanbpsg 2001-06-19 07:18:02: Pull and clean in process Message-ID: From seymour at snf.stanford.edu Wed Jun 20 09:05:31 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 20, 2001 9:05:31 AM Subject: Shutdown tylanbpsg 2001-06-19 07:18:02: Pull and clean in process Message-ID: the tube is cleaned. It passed cold and hot leak check. The tube has been coated with poly and will now need an uniformity test. From seymour at snf.stanford.edu Wed Jun 20 09:06:13 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 20, 2001 9:06:13 AM Subject: Shutdown tylanbpsg 2001-06-20 09:06:12: need uniformity test Message-ID: From seymour at snf.stanford.edu Wed Jun 20 02:49:12 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 20, 2001 2:49:12 PM Subject: Shutdown tylanbpsg 2001-06-20 09:06:12: need uniformity test Message-ID: uniformity test completed. system is up for use. From phimmer at snf.stanford.edu Sun Jun 24 12:39:59 2001 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Jun 24, 2001 12:39:59 PM Subject: Problem tylanbpsg 2001-06-24 12:39:58: psg400 Message-ID: templ=367 pwr=14% tempc=365 pwr=8% temps=390 pwr= 11% during deposition. Prob with calibration?