Problem tylanbpsg 2001-06-14 20:13:54: TMPL control bad

jawad at snf.stanford.edu jawad at snf.stanford.edu
Thu Jun 14 08:13:55 PDT 2001


I am using LTO450P.  TMPL,TMPC and TMPS are set to be at 450C.  Tube has very well controlled TMPC and TMPS around 450C however TMPL is not going above 410C even after 1 hour temp stabilization.  In the status page controller shows that TMPL=410 is Good whereas it should show it to be Low.  This huge temperature gradient on the front side of the tube may explainn 20% wafer-to-wafer variation on the non-metal side.  Can you please take a look at the temperature controller.   thank you very much. 




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