Problem tylanbpsg 2001-06-14 20:13:54: TMPL control bad

gsarmien at snf.stanford.edu gsarmien at snf.stanford.edu
Mon Jun 18 10:05:23 PDT 2001


When using the LTO450P recipe, you need to HOLD it at
the final temp sta step and wait for the temp to stabilize at
at 450C before going to the dep step.
Gladys




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