From seymour at snf.stanford.edu Mon Mar 5 06:03:49 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 5, 2001 6:03:49 AM Subject: Shutdown tylanbpsg 2001-03-05 06:03:48: burnbox clean Message-ID: From seymour at snf.stanford.edu Mon Mar 5 07:46:00 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 5, 2001 7:46:00 AM Subject: Shutdown tylanbpsg 2001-03-05 06:03:48: burnbox clean completed Message-ID: From lindert at snf.stanford.edu Thu Mar 8 05:24:01 2001 From: lindert at snf.stanford.edu (lindert at snf.stanford.edu) Date: Mar 8, 2001 5:24:01 PM Subject: Problem tylanbpsg 2001-03-08 17:24:01: mos-clean wand Message-ID: mos-clean wand broke From seymour at snf.stanford.edu Mon Mar 12 11:31:19 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 12, 2001 11:31:19 AM Subject: Problem tylanbpsg 2001-03-08 17:24:01: mos-clean wand is ok Message-ID: From latta at snf.stanford.edu Tue Mar 13 11:34:26 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mar 13, 2001 11:34:26 AM Subject: Problem tylanbpsg 2001-03-13 11:34:25: Front boat broken Message-ID: Gents- The front nonmetal boat has a broken side rail. This is causing turbulence with the ass flow. Do we have a replcement boat? I am planning on replacing all of the dummies. They are nasty.... From latta at snf.stanford.edu Tue Mar 13 11:43:44 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 13 Mar 2001 11:43:44 -0800 (PST) Subject: Problem tylanbpsg 2001-03-13 11:34:25: Front boat broken Message-ID: he he he Love that typo!! From seymour at snf.stanford.edu Thu Mar 15 07:20:38 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 15, 2001 7:20:38 AM Subject: Shutdown tylanbpsg 2001-03-15 07:20:36: burnbox temp low Message-ID: From seymour at snf.stanford.edu Thu Mar 15 01:48:02 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 15, 2001 1:48:02 PM Subject: Shutdown tylanbpsg 2001-03-15 07:20:36: burnbox temp is up tube is up Message-ID: From seymour at snf.stanford.edu Thu Mar 15 01:48:28 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 15, 2001 1:48:28 PM Subject: Problem tylanbpsg 2001-03-13 11:34:25: Front boat replaced Message-ID: From seymour at snf.stanford.edu Fri Mar 16 08:04:25 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 16, 2001 8:04:25 AM Subject: Shutdown tylanbpsg 2001-03-16 08:04:24: quatrtz clean in process Message-ID: From seymour at snf.stanford.edu Fri Mar 16 08:04:56 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 16, 2001 8:04:56 AM Subject: Shutdown tylanbpsg 2001-03-16 08:04:55: Message-ID: From seymour at snf.stanford.edu Tue Mar 20 07:46:50 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 20, 2001 7:46:50 AM Subject: Shutdown tylanbpsg 2001-03-16 08:04:55: Message-ID: From seymour at snf.stanford.edu Tue Mar 20 07:48:17 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 20, 2001 7:48:17 AM Subject: Shutdown tylanbpsg 2001-03-16 08:04:24: quatrtz clean is completed Message-ID: system is heating up to do a poly coat then it will be released for characterization. From seymour at snf.stanford.edu Tue Mar 20 07:48:51 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 20, 2001 7:48:51 AM Subject: Shutdown tylanbpsg 2001-03-20 07:48:49: needs to be coated and tested Message-ID: From seymour at snf.stanford.edu Wed Mar 21 02:26:10 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 21, 2001 2:26:10 PM Subject: Shutdown tylanbpsg 2001-03-20 07:48:49: needs to be coated and tested Message-ID: tube has been coated From seymour at snf.stanford.edu Wed Mar 21 02:26:46 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 21, 2001 2:26:46 PM Subject: Shutdown tylanbpsg 2001-03-21 14:26:44: needs characterization Message-ID: From latta at snf.stanford.edu Fri Mar 23 05:14:37 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mar 23, 2001 5:14:37 PM Subject: Shutdown tylanbpsg 2001-03-21 14:26:44: needs characterization Message-ID: Done! Uniformity not the greatest; nonmetal wafer to wafer ~20%, within wafer ~10-15% metal wafer to wafer ~1%, within wafer ~5% From yangxu at snf.stanford.edu Fri Mar 30 01:52:30 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Mar 30, 2001 1:52:30 AM Subject: Shutdown tylanbpsg 2001-03-30 01:52:29: one boat broken Message-ID: I broke the inner most boat while replacing the last dummy wafer which was the most inside the tube. No wafer was broken. Sorry for the trouble. From shott at snf.stanford.edu Sat Mar 31 08:36:50 2001 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mar 31, 2001 8:36:50 AM Subject: Shutdown tylanbpsg 2001-03-30 01:52:29: one boat broken Message-ID: I've removed this shutdown ... and set it as a problem ... based on the note that Matt Hopcroft recieved from Ray Seymour. Please be very careful and observant when running this. From shott at snf.stanford.edu Sat Mar 31 08:37:55 2001 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mar 31, 2001 8:37:55 AM Subject: Problem tylanbpsg 2001-03-31 08:37:54: Caution ... Message-ID: I've set this as a problem, based on the fact that Matt Hopcroft received a note from Ray that it was fixed. This problem is a note to remind people to proceed with caution. Thanks, John