From zappe at snf.stanford.edu Thu Oct 4 01:58:51 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Oct 4, 2001 1:58:51 AM Subject: Problem tylanbpsg 2001-10-04 01:58:50: MFS alarm / no PH3 / low dep rate Message-ID: Program used was PSG400. Percentage of phosphorous was chosen to be 8 %. But an MFS alarm ocurred continuously during deposition. The actual PH3 flow was zero. An the resulting layer thickness was 230 nm instead of 2000 nm after 90 minutes of deposition. From seymour at snf.stanford.edu Thu Oct 4 08:30:17 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 4, 2001 8:30:17 AM Subject: Problem tylanbpsg 2001-10-04 01:58:50: MFS alarm / no PH3 / low dep rate Message-ID: gas jungle silane valve not turned on. Turned on the valve and flowed the PH3 and it was ok. System is up From seymour at snf.stanford.edu Wed Oct 10 07:59:01 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 10, 2001 7:59:01 AM Subject: Shutdown tylanbpsg 2001-10-10 07:58:59: silane cylinder change Message-ID: From seymour at snf.stanford.edu Thu Oct 11 07:20:06 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 11, 2001 7:20:06 AM Subject: Shutdown tylanbpsg 2001-10-10 07:58:59: silane cylinder change Message-ID: the leak test passed system is up From amol at snf.stanford.edu Sat Oct 27 03:15:12 2001 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Oct 27, 2001 3:15:12 PM Subject: Problem tylanbpsg 2001-10-27 15:15:10: No deposition! Message-ID: I did not find LTO on my wafers after my LTO400 run of 1minute. Probably the pressure went over 1torr in STEP50. Leak check pressure was quite high (30 mtorr). From amol at snf.stanford.edu Mon Oct 29 12:14:13 2001 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Oct 29, 2001 12:14:13 PM Subject: Problem tylanbpsg 2001-10-29 12:14:11: Dep looks OK. Ignore earlier report. Message-ID: The deposition I did on Sunday (10/28) looks fine. So ignore previous problem. From latta at snf.stanford.edu Mon Oct 29 05:47:15 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 29, 2001 5:47:15 PM Subject: Problem tylanbpsg 2001-10-29 12:14:11: Dep looks OK. Ignore earlier report. Message-ID: From latta at snf.stanford.edu Mon Oct 29 05:47:21 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 29, 2001 5:47:21 PM Subject: Problem tylanbpsg 2001-10-27 15:15:10: No deposition! Message-ID: From suzanne at snf.stanford.edu Mon Oct 29 07:50:46 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: Oct 29, 2001 7:50:46 PM Subject: Problem tylanbpsg 2001-10-29 19:50:45: tube will not pull automatically Message-ID: From suzanne at snf.stanford.edu Mon Oct 29 08:08:19 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: Oct 29, 2001 8:08:19 PM Subject: Problem tylanbpsg 2001-10-29 20:08:16: heavy flaking on tube Message-ID: From latta at snf.stanford.edu Wed Oct 31 10:46:26 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 31, 2001 10:46:26 AM Subject: Problem tylanbpsg 2001-10-29 20:08:16: heavy flaking on tube Message-ID: Tube being cleaned