Problem tylanbpsg 2001-10-04 01:58:50: MFS alarm / no PH3 / low dep rate

zappe at snf.stanford.edu zappe at snf.stanford.edu
Thu Oct 4 01:58:51 PDT 2001


Program used was PSG400. Percentage of phosphorous was chosen to be 8 %. But an MFS alarm ocurred continuously during deposition. The actual PH3 flow was zero. An the resulting layer thickness was 230 nm instead of 2000 nm after 90 minutes of deposition.




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