Problem tylanbpsg 2001-10-27 15:15:10: No deposition!

amol at snf.stanford.edu amol at snf.stanford.edu
Sat Oct 27 03:15:12 PDT 2001


I did not find LTO on my wafers after my LTO400 run of 1minute. Probably the pressure went over 1torr in STEP50. Leak check pressure was quite high (30 mtorr).




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