From tkramer at snf.stanford.edu Tue Sep 4 04:16:36 2001 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Sep 4, 2001 4:16:36 PM Subject: Problem tylanbpsg 2001-09-04 16:16:35: flakes in tube Message-ID: Opened tube and saw flakes and particles all over the place. Inspected Brian Greene's wafers from 9/3/01and saw dense (>1/50um2), 1-2um diameter spots under dark field, lowest power. Compared to wafers that were deposited 2 months ago and have been sitting in a litho-type, dusty box ever since. The old wafers had fewer spots than the recent ones (which are in a clean box). Flakes, chunks of oxide, chunks of polysilicon-looking stuff are all over the inside of the tube, boat, and lid. Did not run my wafers. From latta at snf.stanford.edu Tue Sep 4 04:53:40 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 4, 2001 4:53:40 PM Subject: Shutdown tylanbpsg 2001-09-04 16:53:38: Shutdown for testing. Message-ID: From mdickey at snf.stanford.edu Wed Sep 12 02:42:45 2001 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 12, 2001 2:42:45 PM Subject: Shutdown tylanbpsg 2001-09-04 16:53:38: Shutdown for testing. Message-ID: cleaning tube From mdickey at snf.stanford.edu Wed Sep 12 02:42:57 2001 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 12, 2001 2:42:57 PM Subject: Problem tylanbpsg 2001-09-04 16:16:35: flakes in tube Message-ID: cleaning tube From mdickey at snf.stanford.edu Wed Sep 12 02:44:28 2001 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 12, 2001 2:44:28 PM Subject: Shutdown tylanbpsg 2001-09-12 14:44:23: needs characterization Message-ID: tube pulled and cleaned, passed cold and hot leak check tube coated, needs thickness and uniformity From latta at snf.stanford.edu Thu Sep 13 05:35:30 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 13, 2001 5:35:30 PM Subject: Shutdown tylanbpsg 2001-09-12 14:44:23: needs characterization Message-ID: Uniformity results; Boat #1 3446 3584 Boat#2 3437 4010 Boat3# 4237 4297 Boat#4 4347 4304 From wliu at snf.stanford.edu Tue Sep 18 12:49:23 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Sep 18, 2001 12:49:23 PM Subject: Problem tylanbpsg 2001-09-18 12:49:21: moving cable rubbing against metal panel Message-ID: the boat doesn't want to come out or go in on its own due to the cable rubbing against metal panel...but boat can still be manuevered manually From beckwith at snf.stanford.edu Tue Sep 18 13:51:44 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 18 Sep 2001 13:51:44 -0700 Subject: Problem tylanbpsg 2001-09-18 12:49:21: moving cable rubbing against metal panel Message-ID: >the boat doesn't want to come out or go in on its own due to the >cable rubbing against metal panel...but boat can still be manuevered >manually This is obviously not good! The potential for metal flakes are high when the cable is rubbing against metal. From seymour at snf.stanford.edu Tue Sep 18 02:43:02 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 18, 2001 2:43:02 PM Subject: Problem tylanbpsg 2001-09-18 12:49:21: moving cable rubbing against metal panel Message-ID: adjusted height of pully for drive cable and checked loader in/out. looks ok From tkramer at snf.stanford.edu Fri Sep 21 05:07:22 2001 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Sep 21, 2001 5:07:22 PM Subject: Comment tylanbpsg 2001-09-21 17:07:21: particles on wafers Message-ID: Finally inspected wafers that got lto deposition on Tuesday and Wednesday of this week. Severe particles present. Quite dense under dark field, lowest mag. Has anyone else had this problem? Users before and after should be queried - is this related to the broken thermocouple sheath? Wafers were bare silicon.