From latta at snf.stanford.edu Tue Apr 2 01:59:42 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 2, 2002 1:59:42 PM Subject: Shutdown tylanbpsg 2002-04-02 13:59:35: Failed lk ck 3X. Message-ID: From seymour at snf.stanford.edu Tue Apr 2 03:09:44 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 2, 2002 3:09:44 PM Subject: Shutdown tylanbpsg 2002-04-02 13:59:35: Failed lk ck 3X. Message-ID: moved door assyembly to reposition door seal. From seymour at snf.stanford.edu Tue Apr 2 03:11:23 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 2, 2002 3:11:23 PM Subject: Problem tylanbpsg 2002-04-02 15:11:22: door not opening at end of run Message-ID: From seymour at snf.stanford.edu Tue Apr 2 03:52:36 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 2, 2002 3:52:36 PM Subject: Problem tylanbpsg 2002-04-02 15:11:22: door not opening at end of run Message-ID: unloaded in auto at end of recipe From latta at snf.stanford.edu Tue Apr 2 05:03:40 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 2, 2002 5:03:40 PM Subject: Shutdown tylanbpsg 2002-04-02 17:03:40: Wafers covered in particles. Message-ID: Balaji's wafers are covered in particles by microscope observation. I'm not sure what to do about this; his wafers remained in the system as it failed three leak checks before they were run through deposition; were the particles intro- duced during the leak checks? Is the quatzware covered with them as well? Should we do another pull and clean? Advise, please. From seymour at snf.stanford.edu Wed Apr 3 11:22:23 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 3, 2002 11:22:23 AM Subject: Shutdown tylanbpsg 2002-04-02 17:03:40: Wafers covered in particles. Message-ID: A second deposition did not have the particle problem From liji at snf.stanford.edu Sat Apr 6 01:30:18 2002 From: liji at snf.stanford.edu (liji at snf.stanford.edu) Date: Apr 6, 2002 1:30:18 AM Subject: Shutdown tylanbpsg 2002-04-06 01:30:17: Pump system failed Message-ID: The pump seemed not working. At step 25, the process pressure didnot get pump down. (LTO400). Tried twice, both failed. Load pump11, also failed to pump down. From mdickey at snf.stanford.edu Mon Apr 8 08:11:15 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 8, 2002 8:11:15 AM Subject: Shutdown tylanbpsg 2002-04-06 01:30:17: Pump system failed Message-ID: Replaced broken injectors and t.c. sheath. Running pump program. System should be ready when it comes up to temp. From cmfaulkn at snf.stanford.edu Wed Apr 17 05:27:06 2002 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Apr 17, 2002 5:27:06 PM Subject: Problem tylanbpsg 2002-04-17 17:27:04: flaking on cantilevers Message-ID: The cantilevers are flaking in the very back (furthest from the door) From mdickey at snf.stanford.edu Thu Apr 18 09:07:59 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 18, 2002 9:07:59 AM Subject: Problem tylanbpsg 2002-04-17 17:27:04: flaking on cantilevers Message-ID: vacuumed the flakes off the rods, should be ok to use From mdickey at snf.stanford.edu Wed Apr 24 01:09:42 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 24, 2002 1:09:42 PM Subject: Shutdown tylanbpsg 2002-04-24 13:09:41: pull and clean Message-ID: tube is being put down for a pull and clean From latta at snf.stanford.edu Fri Apr 26 03:18:58 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 26, 2002 3:18:58 PM Subject: Shutdown tylanbpsg 2002-04-24 13:09:41: pull and clean Message-ID: Uniformity test run ok. A little thick on the bottom of the wafer compared to the top, but within 10%. Results in logbook. From seymour at snf.stanford.edu Mon Apr 29 11:31:26 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 29, 2002 11:31:26 AM Subject: Shutdown tylanbpsg 2002-04-29 11:31:25: tube had no depoition, has a leak Message-ID: From mdickey at snf.stanford.edu Mon Apr 29 01:23:03 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 29, 2002 1:23:03 PM Subject: Shutdown tylanbpsg 2002-04-29 11:31:25: tube had no depoition, has a leak Message-ID: Readjusted door and purged tube. Current base is 10 m.t. and rate of rise was 8-10 m.t. a min. Currently in pump program, ready to use From mdickey at snf.stanford.edu Tue Apr 30 03:18:13 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 30, 2002 3:18:13 PM Subject: Shutdown tylanbpsg 2002-04-30 15:18:12: Leak Message-ID: Tube has a leak, will trouble shoot tomorrow a.m.