From seymour at snf.stanford.edu Thu Aug 1 01:20:20 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 1, 2002 1:20:20 PM Subject: Shutdown tylanbpsg 2002-07-31 08:39:57: tubeclean Message-ID: clean completed tube coated and ready for test From seymour at snf.stanford.edu Thu Aug 1 01:20:50 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 1, 2002 1:20:50 PM Subject: Shutdown tylanbpsg 2002-08-01 13:20:49: Needs characterization after pull and clean Message-ID: From seymour at snf.stanford.edu Fri Aug 2 11:24:37 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 2, 2002 11:24:37 AM Subject: Problem tylanbpsg 2002-07-29 20:38:33: failed leak check 1st time Message-ID: tube passed leak check first time this morning From gladys at snf.stanford.edu Fri Aug 2 11:51:00 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 2, 2002 11:51:00 AM Subject: Shutdown tylanbpsg 2002-08-01 13:20:49: Needs characterization after pull and clean:testrun completed, ok to use Message-ID: From rohits at snf.stanford.edu Sun Aug 4 08:58:47 2002 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Aug 4, 2002 8:58:47 PM Subject: Problem tylanbpsg 2002-08-04 20:58:46: O2 and SiH4 MFS Alarm during dep Message-ID: First there was an O2 MFS alarm (O2 .GLEAK). During the 6 minute dep, O2 (setpt 115) did not turn on - remained at 12sccm. SiH4 turned on but then shut off 4 minutes into the dep. The wafers did not seem to have any deposition on them. Alarm Ack cleared the SiH4 .FNTLK alarm but the O2 is still alarming. -- Rohit From seymour at snf.stanford.edu Mon Aug 5 06:38:32 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 5, 2002 6:38:32 AM Subject: Shutdown tylanbpsg 2002-08-05 06:38:32: changing SiH4 bottle Message-ID: From seymour at snf.stanford.edu Tue Aug 6 07:10:42 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 6, 2002 7:10:42 AM Subject: Problem tylanbpsg 2002-08-04 20:58:46: O2 and SiH4 MFS Alarm during dep Message-ID: changed sih4 cylinder From seymour at snf.stanford.edu Tue Aug 6 07:10:57 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 6, 2002 7:10:57 AM Subject: Shutdown tylanbpsg 2002-08-05 06:38:32: changing SiH4 bottle Message-ID: leak check passed From gladys at snf.stanford.edu Tue Aug 6 07:57:42 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 6, 2002 7:57:42 AM Subject: Shutdown tylanbpsg 2002-08-06 07:57:41: waiting for test result Message-ID: From gladys at snf.stanford.edu Tue Aug 6 10:02:08 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 6, 2002 10:02:08 AM Subject: Shutdown tylanbpsg 2002-08-06 07:57:41: waiting for test result: silane flow is ok Message-ID: From maurice at snf.stanford.edu Thu Aug 8 02:50:05 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Aug 8, 2002 2:50:05 PM Subject: Comment tylanbpsg 2002-08-08 14:50:05: tylanbpsg reservation cancelled; LTO free until 6 Message-ID: From mdickey at snf.stanford.edu Fri Aug 16 09:55:37 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Aug 16, 2002 9:55:37 AM Subject: Comment tylanbpsg 2002-08-16 09:55:36: Pull and clean Message-ID: The tube is going down for a pull and clean next week From gladys at snf.stanford.edu Tue Aug 20 09:40:40 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 20, 2002 9:40:40 AM Subject: Shutdown tylanbpsg 2002-08-20 09:40:39: tube clean Message-ID: From seymour at snf.stanford.edu Wed Aug 21 11:28:49 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 21, 2002 11:28:49 AM Subject: Shutdown tylanbpsg 2002-08-20 09:40:39: tube clean Message-ID: clean completed needs testing From seymour at snf.stanford.edu Wed Aug 21 11:29:14 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 21, 2002 11:29:14 AM Subject: Shutdown tylanbpsg 2002-08-20 08:33:00: tube clean Message-ID: completed From seymour at snf.stanford.edu Wed Aug 21 11:29:32 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 21, 2002 11:29:32 AM Subject: Shutdown tylanbpsg 2002-08-21 11:29:31: needs testing after clean Message-ID: From maurice at snf.stanford.edu Thu Aug 22 05:30:42 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Aug 22, 2002 5:30:42 PM Subject: Shutdown tylanbpsg 2002-08-21 11:29:31: needs testing after clean Message-ID: completed. From maurice at snf.stanford.edu Thu Aug 22 05:34:34 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Aug 22, 2002 5:34:34 PM Subject: Problem tylanbpsg 2002-08-22 17:34:33: evaluating uniformity Message-ID: From jenwang at snf.stanford.edu Mon Aug 26 12:30:51 2002 From: jenwang at snf.stanford.edu (jenwang at snf.stanford.edu) Date: Aug 26, 2002 12:30:51 PM Subject: Shutdown tylanbpsg 2002-08-26 12:30:50: leakage check failed Message-ID: In the step 40 of PSG400, the leakage check failed and the process jumped to step 105. Also the base pressure in the step 35 is too high. I tried trice, but the process still failed. From mdickey at snf.stanford.edu Mon Aug 26 02:55:41 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Aug 26, 2002 2:55:41 PM Subject: Comment tylanbpsg 2002-08-26 14:55:40: Tube replace Message-ID: Injector port of tube is broken. Tube needs to be replaced From maurice at snf.stanford.edu Tue Aug 27 09:27:22 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Aug 27, 2002 9:27:22 AM Subject: Comment tylanbpsg 2002-08-27 09:27:21: today 1:30-3:00 cancelled reservation Message-ID: From mdickey at snf.stanford.edu Tue Aug 27 10:41:17 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Aug 27, 2002 10:41:17 AM Subject: Comment tylanbpsg 2002-08-27 10:41:16: Test Message-ID: Tube has been replaced and is leak tight. As soon as it comes up to temp. It will be redy for testing From maurice at snf.stanford.edu Tue Aug 27 06:00:48 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Aug 27, 2002 6:00:48 PM Subject: Shutdown tylanbpsg 2002-08-26 12:30:50: leakage check failed Message-ID: leak found From yyao at snf.stanford.edu Thu Aug 29 11:27:24 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 29, 2002 11:27:24 AM Subject: Problem tylanbpsg 2002-08-29 11:27:23: leak check failed during 1st run Message-ID: From yyao at snf.stanford.edu Thu Aug 29 01:16:23 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 29, 2002 1:16:23 PM Subject: Problem tylanbpsg 2002-08-29 13:16:22: particles on metal end Message-ID: From tberg at snf.stanford.edu Fri Aug 30 08:10:01 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Aug 30, 2002 8:10:01 AM Subject: Problem tylanbpsg 2002-08-29 11:27:23: leak check failed during 1st run Message-ID: From tberg at snf.stanford.edu Fri Aug 30 08:14:31 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Aug 30, 2002 8:14:31 AM Subject: Comment tylanbpsg 2002-08-30 08:14:31: Leak Message-ID: Second run was fine, i did a manual leak check base 10mT/min. Leak rate 4 mT per min From tberg at snf.stanford.edu Fri Aug 30 08:15:41 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Aug 30, 2002 8:15:41 AM Subject: Problem tylanbpsg 2002-08-29 13:16:22: particles on metal end Message-ID: Vacuumed particles from cantilever rods on rear of loader