From maurice at snf.stanford.edu Tue Nov 12 10:42:51 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Nov 12, 2002 10:42:51 AM Subject: Shutdown tylanbpsg 2002-11-12 10:42:50: non metal boat contaminated with metal wafers Message-ID: user put metal wafers in non metal portion of LTO From maurice at snf.stanford.edu Tue Nov 12 01:49:11 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Nov 12, 2002 1:49:11 PM Subject: Problem tylanbpsg 2002-11-12 07:56:02: one metal wafer put in the end of the second boat Message-ID: quartz and wafers changed From maurice at snf.stanford.edu Tue Nov 12 01:49:37 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Nov 12, 2002 1:49:37 PM Subject: Shutdown tylanbpsg 2002-11-12 10:42:50: non metal boat contaminated with metal wafers Message-ID: quaetz and wafers changed From ychliu at snf.stanford.edu Sat Nov 16 04:33:37 2002 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Nov 16, 2002 4:33:37 PM Subject: Shutdown tylanbpsg 2002-11-16 16:33:36: quartz broken Message-ID: I'm so sorry to report this problem caused by my really really stupid mistake. I was trying to deposit 1um LTO and found the oxide thickness on the dummy wafers was already 2.62um. So I thought it might be better to change the dummies first and strip the oxide on them while running the deposition. Unfortunately, after I unloaded the dummies and loaded one box of nonmetal dummies, I found there were no more nonmetal dummy wafers and the metal dummies were not ready to load--the previous user who changed the dummies didn't strip the oxide. I had to strip the oxide on the unloaded dummies and reload them before I could do my deposition. While I was stripping the oxide using the wet benches, I didn't realize that tylanfga was coming out. (Actually I could have finished wafer loading before tylanfga came out if the dummies had been ready.) So the quartz boat cover was damaged when fga tube came out. I know this is a very stupid mistake. I appologized for the troubles I caused. As a punishment for myself, I stripped the oxide on both the two sets of dummy wafers even though I didn't get a chance to run my deposition. From tberg at snf.stanford.edu Mon Nov 18 07:00:24 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Nov 18, 2002 7:00:24 AM Subject: Shutdown tylanbpsg 2002-11-16 16:33:36: quartz broken Message-ID: Mike Changed the quartz lid on the boat From chion at snf.stanford.edu Sat Nov 23 03:09:31 2002 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Nov 23, 2002 3:09:31 PM Subject: Problem tylanbpsg 2002-11-23 15:09:30: Pump prog didn't go thru...not venting Message-ID: From tberg at snf.stanford.edu Mon Nov 25 06:40:21 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Nov 25, 2002 6:40:21 AM Subject: Shutdown tylanbpsg 2002-11-25 06:40:20: Won't pump Down Message-ID: TC sheath is broken. From tberg at snf.stanford.edu Mon Nov 25 08:21:22 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Nov 25, 2002 8:21:22 AM Subject: Shutdown tylanbpsg 2002-11-25 06:40:20: Won't pump Down Message-ID: Mike replaced broken TC sheath and cantilever sheath. leak checked fine, 15mT per minute From tberg at snf.stanford.edu Mon Nov 25 08:21:40 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Nov 25, 2002 8:21:40 AM Subject: Problem tylanbpsg 2002-11-23 15:09:30: Pump prog didn't go thru...not venting Message-ID: Replaced broken Quartz From tberg at snf.stanford.edu Tue Nov 26 06:23:26 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Nov 26, 2002 6:23:26 AM Subject: Shutdown tylanbpsg 2002-11-26 06:23:25: Scheduled Pull and Clean Message-ID: Tube down for scheduled pull and clean From mdickey at snf.stanford.edu Tue Nov 26 02:49:34 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 26, 2002 2:49:34 PM Subject: Comment tylanbpsg 2002-11-26 14:49:34: Pull and clean Message-ID: The pull and clean is done. Tube is coated. Will clean the rest of the boats in the morning. Then ready for testing From maurice at snf.stanford.edu Wed Nov 27 15:41:15 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 27 Nov 2002 15:41:15 -0800 Subject: LTO test result/green light Message-ID: <3DE5581B.70575035@snf.stanford.edu> cen top bot rig lef uni center 5871 6023 5457 6164 5512 12.17% boat1 center 6762 6969 6284 6969 6243 10.93% boat2 center 6680 7084 6486 7143 6417 10.73% of tube center 6228 7337 5770 7204 5663 25.99% boat3 center 5879 6033 5672 6319 5591 12.39% boat4 Boats 1 and 2 are non-metal. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at snf.stanford.edu Wed Nov 27 03:47:35 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Nov 27, 2002 3:47:35 PM Subject: Shutdown tylanbpsg 2002-11-26 06:23:25: LTO up. Message-ID: uniformity info in archives 10-25%