From rcrane at snf.stanford.edu Fri Oct 4 04:19:11 2002 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Oct 4, 2002 4:19:11 PM Subject: Problem tylanbpsg 2002-10-04 16:19:10: Low SiH4 level see e-mail to users Message-ID: From mdickey at snf.stanford.edu Mon Oct 7 06:50:48 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Oct 7, 2002 6:50:48 AM Subject: Shutdown tylanbpsg 2002-10-07 06:50:46: Bottle change Message-ID: System is down for Silane bottle change From mdickey at snf.stanford.edu Tue Oct 8 07:18:18 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Oct 8, 2002 7:18:18 AM Subject: Shutdown tylanbpsg 2002-10-07 06:50:46: Bottle change Message-ID: Bottle has been changed . ready for use From mdickey at snf.stanford.edu Tue Oct 8 07:18:31 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Oct 8, 2002 7:18:31 AM Subject: Problem tylanbpsg 2002-10-04 16:19:10: Low SiH4 level see e-mail to users Message-ID: Botte is changed From vikas at snf.stanford.edu Wed Oct 9 06:14:32 2002 From: vikas at snf.stanford.edu (vikas at snf.stanford.edu) Date: Oct 9, 2002 6:14:32 PM Subject: Problem tylanbpsg 2002-10-09 18:14:31: tylanbsg non-metal wand contamination Message-ID: Hi there: I wanted to report the following I touched the non-metal wand with wafers on the metal side of Tylan bpsg by mistake. So the non-metal wand is now metal contaminated and needs to be changed. I have put a note next to the wand mentioning that it is contamnated. It is around 6:00 pm in evening so I could not get a new un-contaminated wand from the storage. I will appreciate if you can take care of this or let me know what to do. Thanks vikas Vikas From ericp at snf.stanford.edu Wed Oct 9 10:31:00 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Oct 9, 2002 10:31:00 PM Subject: Shutdown tylanbpsg 2002-10-09 22:31:00: Leak on cantellever rod feedhru Message-ID: Try to pump it down and you can hear it! From seymour at snf.stanford.edu Thu Oct 10 11:11:41 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 10, 2002 11:11:41 AM Subject: Problem tylanbpsg 2002-10-09 18:14:31: tylanbsg non-metal wand contamination Message-ID: cleaned and installed new wand tip for tube. From seymour at snf.stanford.edu Thu Oct 10 11:12:20 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 10, 2002 11:12:20 AM Subject: Shutdown tylanbpsg 2002-10-09 22:31:00: Leak on cantellever rod feedhru Message-ID: replaced loader sheath and did a leak check. It was 6 mt/min From seymour at snf.stanford.edu Thu Oct 10 11:12:40 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 10, 2002 11:12:40 AM Subject: Shutdown tylanbpsg 2002-10-10 11:12:40: needs test after repair Message-ID: From maurice at snf.stanford.edu Thu Oct 10 11:25:29 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 10, 2002 11:25:29 AM Subject: Shutdown tylanbpsg 2002-10-10 11:12:40: needs test after repair Message-ID: Ray replaced sheth and checked pumpdown; released for testing From peter at snf.stanford.edu Fri Oct 11 10:09:12 2002 From: peter at snf.stanford.edu (peter at snf.stanford.edu) Date: Oct 11, 2002 10:09:12 AM Subject: Problem tylanbpsg 2002-10-11 10:09:11: vacuum tweezer broken Message-ID: From mdickey at snf.stanford.edu Fri Oct 11 10:18:00 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Oct 11, 2002 10:18:00 AM Subject: Problem tylanbpsg 2002-10-11 10:09:11: vacuum tweezer broken Message-ID: Supplied replacment to Nancy From yoshh at snf.stanford.edu Sun Oct 13 11:48:02 2002 From: yoshh at snf.stanford.edu (yoshh at snf.stanford.edu) Date: Oct 13, 2002 11:48:02 AM Subject: Problem tylanbpsg 2002-10-13 11:48:01: hight pressure, low deposition rate Message-ID: pressure reaches >450 during run, and deposition rate is low. From ankurjn at snf.stanford.edu Sun Oct 13 11:39:24 2002 From: ankurjn at snf.stanford.edu (ankurjn at snf.stanford.edu) Date: Oct 13, 2002 11:39:24 PM Subject: Problem tylanbpsg 2002-10-13 23:39:22: high process pressure, dep aborted Message-ID: Too high process pressure. Aborts dep within 1 minute. Passes leak check though From seymour at snf.stanford.edu Mon Oct 14 07:43:14 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 14, 2002 7:43:14 AM Subject: Problem tylanbpsg 2002-10-13 23:39:22: high process pressure, dep aborted Message-ID: changed pump inlet screes From seymour at snf.stanford.edu Mon Oct 14 07:43:40 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 14, 2002 7:43:40 AM Subject: Problem tylanbpsg 2002-10-13 11:48:01: hight pressure, low deposition rate Message-ID: pump inlet screen changed From peter at snf.stanford.edu Mon Oct 14 01:13:54 2002 From: peter at snf.stanford.edu (peter at snf.stanford.edu) Date: Oct 14, 2002 1:13:54 PM Subject: Problem tylanbpsg 2002-10-14 13:13:53: dep rate low Message-ID: From ankurjn at snf.stanford.edu Mon Oct 14 09:36:58 2002 From: ankurjn at snf.stanford.edu (ankurjn at snf.stanford.edu) Date: Oct 14, 2002 9:36:58 PM Subject: Problem tylanbpsg 2002-10-14 21:36:57: process pressure high, dep aborted Message-ID: Process pressure went high again, within 1-2 minutes of start of dep. From seymour at snf.stanford.edu Fri Oct 18 07:14:27 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 7:14:27 AM Subject: Shutdown tylanbpsg 2002-10-18 07:14:26: testing for high dep pressure Message-ID: From seymour at snf.stanford.edu Fri Oct 18 08:12:40 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:12:40 AM Subject: Shutdown tylanbpsg 2002-10-18 07:14:26: testing for high dep pressure Message-ID: test came out good prcpr = 291 @ 115 O2 + 100 SiH4 From seymour at snf.stanford.edu Fri Oct 18 08:14:47 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:14:47 AM Subject: Shutdown tylanbpsg 2002-10-18 07:09:53: high dep pressure abort Message-ID: replaced pump screen and did base pump down and leak rate base 7 leak rate 9. tested with LTO400 gas flows and it was good. From seymour at snf.stanford.edu Fri Oct 18 08:15:12 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:15:12 AM Subject: Problem tylanbpsg 2002-10-17 21:29:58: high pressure, no deposition Message-ID: PRCPR good now From seymour at snf.stanford.edu Fri Oct 18 08:15:25 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:15:25 AM Subject: Problem tylanbpsg 2002-10-14 21:36:57: process pressure high, dep aborted Message-ID: PRCPR good now From seymour at snf.stanford.edu Fri Oct 18 08:15:44 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:15:44 AM Subject: Problem tylanbpsg 2002-10-14 13:13:53: dep rate low Message-ID: PRCPR good now From seymour at snf.stanford.edu Fri Oct 18 08:16:29 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:16:29 AM Subject: Problem tylanbpsg 2002-09-20 17:07:43: Uniformity across wafer ~20% Message-ID: double entry on uniformity From seymour at snf.stanford.edu Fri Oct 18 08:21:56 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 18, 2002 8:21:56 AM Subject: Problem tylanbpsg 2002-10-18 08:21:55: uniformity across the wafer ~ 20% Message-ID: From ankurjn at snf.stanford.edu Sun Oct 20 11:15:24 2002 From: ankurjn at snf.stanford.edu (ankurjn at snf.stanford.edu) Date: Oct 20, 2002 11:15:24 PM Subject: Problem tylanbpsg 2002-10-20 23:15:24: high base pressure - aborted Message-ID: Failed Gross Leak Check (step 30 of LTO400 recipe). Base pressure was too high. I ran it twice, but failed both times. From wtpark at snf.stanford.edu Sun Oct 20 11:15:33 2002 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Oct 20, 2002 11:15:33 PM Subject: Comment tylanbpsg 2002-10-20 23:15:32: quartz part broken in metal boat Message-ID: a small part in the quartz boat(metal side). this is the bottom slot of the boat From ankurjn at snf.stanford.edu Sun Oct 20 11:35:00 2002 From: ankurjn at snf.stanford.edu (ankurjn at snf.stanford.edu) Date: Oct 20, 2002 11:35:00 PM Subject: Problem tylanbpsg 2002-10-20 23:34:59: pump11 failed gross leak check Message-ID: Failed gross leak check at step 15 of pump11 recipe. I tried twice, but it failed both times. From tberg at snf.stanford.edu Mon Oct 21 06:36:10 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 21, 2002 6:36:10 AM Subject: Shutdown tylanbpsg 2002-10-21 06:36:09: tube due for change Message-ID: This tube is at almost 32 microns. shut down forpull and clean From tberg at snf.stanford.edu Tue Oct 22 09:48:46 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 22, 2002 9:48:46 AM Subject: Problem tylanbpsg 2002-10-20 23:15:24: high base pressure - aborted Message-ID: Pull and clean completed-broken injector changed From tberg at snf.stanford.edu Tue Oct 22 09:49:18 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 22, 2002 9:49:18 AM Subject: Problem tylanbpsg 2002-10-20 23:34:59: pump11 failed gross leak check Message-ID: pull and clean completed broken injector changed From tberg at snf.stanford.edu Tue Oct 22 09:50:03 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 22, 2002 9:50:03 AM Subject: Comment tylanbpsg 2002-10-22 09:50:02: Pull and clean completed neeeds test Message-ID: From latta at snf.stanford.edu Tue Oct 22 05:42:44 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 22, 2002 5:42:44 PM Subject: Shutdown tylanbpsg 2002-10-21 06:36:09: tube due for change Message-ID: Tube changed. And, boy is it leak tight! 2mT/min rate of rise.... From latta at snf.stanford.edu Tue Oct 22 05:56:17 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 22, 2002 5:56:17 PM Subject: Problem tylanbpsg 2002-10-18 08:21:55: uniformity across the wafer ~ 20% Message-ID: Uniformity numbers follow. The top of the wafers are low and the bottoms are thickest. But horizontally they look great. I am releasing the tube, but suggest a tweak to improve the uniformity. R C L T B Avr Wf 1 3922 4095 4095 3764 4312 4058 Wf 2 4839 5000 5060 4625 5287 4962 Wf 3 4985 5069 4893 4709 5378 5005 Wf 4 4857 4935 4776 4583 5189 4868 Wf 5 4696 4743 4573 4397 4988 4680 Wf 6 4428 4534 4500 4170 4845 4495 Wf7 4312 4370 4220 4102 4603 4321 Wf8 4531 4590 4602 4350 4799 4575 From seymour at snf.stanford.edu Fri Oct 25 08:24:45 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 8:24:45 AM Subject: Shutdown tylanbpsg 2002-10-25 08:24:44: burnbox needs cleaning Message-ID: From seymour at snf.stanford.edu Fri Oct 25 09:28:24 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 9:28:24 AM Subject: Shutdown tylanbpsg 2002-10-25 08:24:44: burnbox needs cleaning Message-ID: burnbox cleaned From maurice at snf.stanford.edu Tue Oct 29 17:16:11 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Tue, 29 Oct 2002 17:16:11 -0800 Subject: LTO results Message-ID: <3DBF32DB.66E6399@snf.stanford.edu> Hey gang, Here are the results of the LTO test after the injectors were rotated to the tylan recommended locations(2 and 10 o''lock) R C L T B Avr Wf 1 4536 4783 4853 5538 4217 4785 Wf 2 4967 54847 4765 5240 4568 4877 Wf 3 4721 4833 4689 5144 4527 4782 Wf4 4713 4607 4482 4934 4255 4598 Wf5 4484 4437 4441 4727 4288 4475 Please note that the top is about 600A thicker than the bottom. The run Nancy did last week (injectors at 5 and 7 o'clock) was thicker on the bottom: R C L T B Avr Wf 1 3922 4095 4095 3764 4312 4058 Wf 2 4839 5000 5060 4625 5287 4962 Wf 3 4985 5069 4893 4709 5378 5005 Wf 4 4857 4935 4776 4583 5189 4868 Wf 5 4696 4743 4573 4397 4988 4680 Wf 6 4428 4534 4500 4170 4845 4495 Wf7 4312 4370 4220 4102 4603 4321 Wf8 4531 4590 4602 4350 4799 4575 maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From latta at snf.stanford.edu Wed Oct 30 04:32:58 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 30, 2002 4:32:58 PM Subject: Problem tylanbpsg 2002-10-30 16:32:57: Uniformity poor, 27% Message-ID: Results of today's ox test after injector rotation (3/9 positions) Wf C T B R L Avr 1 4607 4105 5011 4807 4309 4568 2 4707 3752 5517 4245 5147 4679 3 4669 4230 5100 4621 4783 4681 4 4499 3921 4893 4321 4836 4494 5 4482 4073 4675 4344 5498 4434 Suggest the injectors return to the original positions, 5/7. Last uniformity ck at 5/7 was 13%. From maurice at snf.stanford.edu Thu Oct 31 16:15:26 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Thu, 31 Oct 2002 16:15:26 -0800 Subject: 10/31 LTO test Message-ID: <3DC1C79E.DE552C2A@snf.stanford.edu> Hello everyone, Here are the results of the LTO test after the injectors were rotated back to our original locations(5 and 7 o''lock) R C L T B Avr uniformity Wf 1 4590 4762 4541 5162 4369 4685 16% Wf 2 5087 4947 4698 5212 4618 4912 12 Wf 3 4884 4789 4606 5164 4545 4798 13 Wf4 4563 4365 4304 5033 3906 4434 25 Wf5 4704 4465 4163 4876 4033 4448 18 -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278