Problem tylanbpsg 2002-10-18 08:21:55: uniformity across the wafer ~ 20%

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Oct 22 05:56:17 PDT 2002


Uniformity numbers follow.  The top of the wafers are low and the bottoms are thickest.  But horizontally they look great.
I am releasing the tube, but suggest a tweak to improve the uniformity.
  
               R          C         L         T         B          Avr
Wf 1    3922  4095   4095   3764   4312     4058
Wf 2    4839  5000  5060    4625   5287     4962
Wf 3    4985  5069  4893   4709   5378      5005
Wf 4    4857  4935  4776   4583   5189      4868
Wf 5    4696  4743  4573   4397   4988      4680
Wf 6    4428  4534  4500   4170   4845      4495
Wf7     4312  4370  4220   4102   4603     4321
Wf8     4531  4590  4602   4350   4799     4575




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