LTO results

Maurice Stevens maurice at snf.stanford.edu
Tue Oct 29 17:16:11 PST 2002


Hey gang,

Here are the results of the LTO test after the injectors were rotated to
the tylan recommended locations(2 and 10 o''lock)
               R          C         L         T         B          Avr
Wf 1    4536  4783   4853   5538   4217     4785

Wf 2    4967  54847  4765   5240   4568      4877

Wf 3    4721  4833  4689   5144   4527      4782

Wf4     4713  4607  4482   4934   4255     4598

Wf5     4484  4437  4441   4727   4288     4475

Please note that the top is about 600A thicker than the bottom.

The run Nancy did last week (injectors at 5 and 7 o'clock) was
thicker on the bottom:

               R          C         L         T         B          Avr
Wf 1    3922  4095   4095   3764   4312     4058
Wf 2    4839  5000  5060    4625   5287     4962
Wf 3    4985  5069  4893   4709   5378      5005
Wf 4    4857  4935  4776   4583   5189      4868
Wf 5    4696  4743  4573   4397   4988      4680
Wf 6    4428  4534  4500   4170   4845      4495
Wf7     4312  4370  4220   4102   4603     4321
Wf8     4531  4590  4602   4350   4799     4575


maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278





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