October 2002 Archives by date

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Starting: Fri Oct 4 04:19:11 PDT 2002
Ending: Thu Oct 31 16:15:26 PST 2002
Messages: 40

• Problem tylanbpsg 2002-10-04 16:19:10: Low SiH4 level see e-mail to users   rcrane at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-07 06:50:46: Bottle change   mdickey at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-07 06:50:46: Bottle change   mdickey at snf.stanford.edu
• Problem tylanbpsg 2002-10-04 16:19:10: Low SiH4 level see e-mail to users   mdickey at snf.stanford.edu
• Problem tylanbpsg 2002-10-09 18:14:31: tylanbsg non-metal wand contamination   vikas at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-09 22:31:00: Leak on cantellever rod feedhru   ericp at snf.stanford.edu
• Problem tylanbpsg 2002-10-09 18:14:31: tylanbsg non-metal wand contamination   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-09 22:31:00: Leak on cantellever rod feedhru   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-10 11:12:40: needs test after repair   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-10 11:12:40: needs test after repair   maurice at snf.stanford.edu
• Problem tylanbpsg 2002-10-11 10:09:11: vacuum tweezer broken   peter at snf.stanford.edu
• Problem tylanbpsg 2002-10-11 10:09:11: vacuum tweezer broken   mdickey at snf.stanford.edu
• Problem tylanbpsg 2002-10-13 23:39:22: high process pressure, dep aborted   ankurjn at snf.stanford.edu
• Problem tylanbpsg 2002-10-13 11:48:01: hight pressure, low deposition rate   yoshh at snf.stanford.edu
• Problem tylanbpsg 2002-10-14 13:13:53: dep rate low   peter at snf.stanford.edu
• Problem tylanbpsg 2002-10-13 23:39:22: high process pressure, dep aborted   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-13 11:48:01: hight pressure, low deposition rate   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-14 21:36:57: process pressure high, dep aborted   ankurjn at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-18 07:14:26: testing for high dep pressure   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-18 07:14:26: testing for high dep pressure   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-18 07:09:53: high dep pressure abort   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-17 21:29:58: high pressure, no deposition   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-14 21:36:57: process pressure high, dep aborted   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-14 13:13:53: dep rate low   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-09-20 17:07:43: Uniformity across wafer ~20%   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-18 08:21:55: uniformity across the wafer ~ 20%   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-10-20 23:15:24: high base pressure - aborted   ankurjn at snf.stanford.edu
• Comment tylanbpsg 2002-10-20 23:15:32: quartz part broken in metal boat   wtpark at snf.stanford.edu
• Problem tylanbpsg 2002-10-20 23:34:59: pump11 failed gross leak check   ankurjn at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-21 06:36:09: tube due for change   tberg at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-21 06:36:09: tube due for change   latta at snf.stanford.edu
• Problem tylanbpsg 2002-10-18 08:21:55: uniformity across the wafer ~ 20%   latta at snf.stanford.edu
• Problem tylanbpsg 2002-10-20 23:15:24: high base pressure - aborted   tberg at snf.stanford.edu
• Problem tylanbpsg 2002-10-20 23:34:59: pump11 failed gross leak check   tberg at snf.stanford.edu
• Comment tylanbpsg 2002-10-22 09:50:02: Pull and clean completed neeeds test   tberg at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-25 08:24:44: burnbox needs cleaning   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-10-25 08:24:44: burnbox needs cleaning   seymour at snf.stanford.edu
• LTO results   Maurice Stevens
• Problem tylanbpsg 2002-10-30 16:32:57: Uniformity poor, 27%   latta at snf.stanford.edu
• 10/31 LTO test   Maurice Stevens

Last message date: Thu Oct 31 16:15:26 PST 2002
Archived on: Fri Jan 11 13:15:18 PST 2013

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