From yyao at snf.stanford.edu Mon Sep 9 05:46:27 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Sep 9, 2002 5:46:27 PM Subject: Problem tylanbpsg 2002-09-09 17:46:27: PRCPR too hign, deposition aborted Message-ID: From tberg at snf.stanford.edu Tue Sep 10 06:52:32 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sep 10, 2002 6:52:32 AM Subject: Shutdown tylanbpsg 2002-09-10 06:52:31: Not pumping down Message-ID: Checking screen From seymour at snf.stanford.edu Tue Sep 10 07:46:37 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 10, 2002 7:46:37 AM Subject: Shutdown tylanbpsg 2002-09-10 06:52:31: Not pumping down Message-ID: installed a clean pump inlet screen From seymour at snf.stanford.edu Tue Sep 10 07:47:02 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 10, 2002 7:47:02 AM Subject: Problem tylanbpsg 2002-09-09 17:46:27: PRCPR too hign, deposition aborted Message-ID: pump inlet screen clogged will replace From seymour at snf.stanford.edu Tue Sep 10 07:47:26 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 10, 2002 7:47:26 AM Subject: Shutdown tylanbpsg 2002-09-10 07:47:26: Needs testing after screen replacement Message-ID: From maurice at snf.stanford.edu Tue Sep 10 03:14:01 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sep 10, 2002 3:14:01 PM Subject: Shutdown tylanbpsg 2002-09-10 07:47:26: screen replaced ok Message-ID: screens replaced. test run ok. up From qwang at snf.stanford.edu Wed Sep 11 07:25:56 2002 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Sep 11, 2002 7:25:56 AM Subject: Shutdown tylanbpsg 2002-09-11 07:25:54: leak check can not pass Message-ID: From seymour at snf.stanford.edu Wed Sep 11 07:26:17 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 11, 2002 7:26:17 AM Subject: Shutdown tylanbpsg 2002-09-11 07:26:16: Not passing leak check Message-ID: From mdickey at snf.stanford.edu Fri Sep 13 07:14:11 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 13, 2002 7:14:11 AM Subject: Comment tylanbpsg 2002-09-13 07:14:07: Testing Message-ID: Tube has been replaced. Ready for testing From mdickey at snf.stanford.edu Fri Sep 13 08:05:12 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 13, 2002 8:05:12 AM Subject: Shutdown tylanbpsg 2002-09-11 07:26:16: Not passing leak check Message-ID: From mdickey at snf.stanford.edu Fri Sep 13 08:05:24 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 13, 2002 8:05:24 AM Subject: Shutdown tylanbpsg 2002-09-11 07:25:54: leak check can not pass Message-ID: Replaced tube, ready for test From mdickey at snf.stanford.edu Fri Sep 13 08:05:42 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 13, 2002 8:05:42 AM Subject: Shutdown tylanbpsg 2002-09-13 08:05:41: Test Message-ID: Tube replaced. Needs test From latta at snf.stanford.edu Fri Sep 13 01:37:13 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 13, 2002 1:37:13 PM Subject: Shutdown tylanbpsg 2002-09-13 08:05:41: Test Message-ID: From latta at snf.stanford.edu Fri Sep 13 01:42:17 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 13, 2002 1:42:17 PM Subject: Problem tylanbpsg 2002-08-22 17:34:33: evaluating uniformity Message-ID: Uniformity tests complete. Just looked at non-metal side. Results; Wf pos. Ave thickness 1 (front) 1063A 23 747A 40 750A 50 (back) 759A Wafer 1 is the very first wafer. Expected it to be different from others. From latta at snf.stanford.edu Mon Sep 16 10:59:16 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 16, 2002 10:59:16 AM Subject: Shutdown tylanbpsg 2002-09-16 10:59:14: loader cable broken! Message-ID: From latta at snf.stanford.edu Mon Sep 16 11:39:06 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 16, 2002 11:39:06 AM Subject: Shutdown tylanbpsg 2002-09-16 10:59:14: loader cable broken! Message-ID: Guys fixed it! From seymour at snf.stanford.edu Tue Sep 17 08:52:35 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 17, 2002 8:52:35 AM Subject: Shutdown tylanbpsg 2002-09-17 08:52:34: changing loader drive cable Message-ID: From seymour at snf.stanford.edu Tue Sep 17 09:19:11 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 17, 2002 9:19:11 AM Subject: Shutdown tylanbpsg 2002-09-17 08:52:34: changing loader drive cable Message-ID: replaced loader cable. Checked loader operation in auto, loader operation is as designed and the tube is up to run From maurice at snf.stanford.edu Thu Sep 19 03:48:25 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sep 19, 2002 3:48:25 PM Subject: Problem tylanbpsg 2002-09-19 15:48:24: deposition not uniform Message-ID: Tube going down tomorrow morning for mait. From seymour at snf.stanford.edu Fri Sep 20 07:02:41 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 20, 2002 7:02:41 AM Subject: Shutdown tylanbpsg 2002-09-20 07:02:37: cleaning burnbox Message-ID: From seymour at snf.stanford.edu Fri Sep 20 08:38:23 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 20, 2002 8:38:23 AM Subject: Shutdown tylanbpsg 2002-09-20 07:02:37: cleaning burnbox Message-ID: clean completed From maurice at snf.stanford.edu Fri Sep 20 08:48:50 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sep 20, 2002 8:48:50 AM Subject: Shutdown tylanbpsg 2002-09-20 08:48:50: Uniformity not uniform Message-ID: From mdickey at snf.stanford.edu Fri Sep 20 10:03:38 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 20, 2002 10:03:38 AM Subject: Shutdown tylanbpsg 2002-09-20 08:48:50: Uniformity not uniform Message-ID: installed new injectors, needs test From mdickey at snf.stanford.edu Fri Sep 20 10:04:10 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 20, 2002 10:04:10 AM Subject: Shutdown tylanbpsg 2002-09-20 10:03:59: Test Message-ID: Replaced injectors, needs uniformity test From maurice at snf.stanford.edu Fri Sep 20 05:01:14 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sep 20, 2002 5:01:14 PM Subject: Shutdown tylanbpsg 2002-09-20 10:03:59: Test Message-ID: Adjustments to improve made. Ready for test From maurice at snf.stanford.edu Fri Sep 20 05:02:01 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sep 20, 2002 5:02:01 PM Subject: Problem tylanbpsg 2002-09-19 15:48:24: deposition not uniform Message-ID: Testing tube. From maurice at snf.stanford.edu Fri Sep 20 05:07:43 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sep 20, 2002 5:07:43 PM Subject: Problem tylanbpsg 2002-09-20 17:07:43: Uniformity across wafer ~20% Message-ID: From anojeh at snf.stanford.edu Wed Sep 25 07:24:38 2002 From: anojeh at snf.stanford.edu (anojeh at snf.stanford.edu) Date: Sep 25, 2002 7:24:38 PM Subject: Problem tylanbpsg 2002-09-25 19:24:37: tylan bpsg pumpdown Message-ID: The pump11 program doesn't seem to be working properly. The pressure does not go below 2000, and program ends after 4 minutes and the system starts alarming. I tried it several times, but it wouldn't work. From seymour at snf.stanford.edu Thu Sep 26 07:42:06 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 26, 2002 7:42:06 AM Subject: Shutdown tylanbpsg 2002-09-26 07:42:05: tube has a leak. Message-ID: From seymour at snf.stanford.edu Thu Sep 26 09:04:17 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 26, 2002 9:04:17 AM Subject: Shutdown tylanbpsg 2002-09-26 07:42:05: tube has a leak. Message-ID: leak repaired and tube checked out From seymour at snf.stanford.edu Thu Sep 26 09:04:37 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 26, 2002 9:04:37 AM Subject: Problem tylanbpsg 2002-09-25 19:24:37: tylan bpsg pumpdown Message-ID: Mike found and repaired the leak From seymour at snf.stanford.edu Thu Sep 26 10:05:51 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 26, 2002 10:05:51 AM Subject: Shutdown tylanbpsg 2002-09-26 10:05:50: testing after repair Message-ID: From seymour at snf.stanford.edu Thu Sep 26 11:17:41 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 26, 2002 11:17:41 AM Subject: Shutdown tylanbpsg 2002-09-26 10:05:50: testing after repair Message-ID: test was good, checked with LTO400 dep time 5 mins. System up to run.