September 2002 Archives by thread

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Starting: Mon Sep 9 05:46:27 PDT 2002
Ending: Thu Sep 26 11:17:41 PDT 2002
Messages: 33

• Problem tylanbpsg 2002-09-09 17:46:27: PRCPR too hign, deposition aborted   yyao at snf.stanford.edu
  • Problem tylanbpsg 2002-09-09 17:46:27: PRCPR too hign, deposition aborted   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-10 07:47:26: screen replaced ok   maurice at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-10 06:52:31: Not pumping down   tberg at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-10 06:52:31: Not pumping down   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-10 07:47:26: Needs testing after screen replacement   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-11 07:25:54: leak check can not pass   qwang at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-11 07:25:54: leak check can not pass   mdickey at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-11 07:26:16: Not passing leak check   seymour at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-11 07:26:16: Not passing leak check   mdickey at snf.stanford.edu
• Problem tylanbpsg 2002-08-22 17:34:33: evaluating uniformity   latta at snf.stanford.edu
• Comment tylanbpsg 2002-09-13 07:14:07: Testing   mdickey at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-13 08:05:41: Test   mdickey at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-13 08:05:41: Test   latta at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-16 10:59:14: loader cable broken!   latta at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-16 10:59:14: loader cable broken!   latta at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-17 08:52:34: changing loader drive cable   seymour at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-17 08:52:34: changing loader drive cable   seymour at snf.stanford.edu
• Problem tylanbpsg 2002-09-19 15:48:24: deposition not uniform   maurice at snf.stanford.edu
  • Problem tylanbpsg 2002-09-19 15:48:24: deposition not uniform   maurice at snf.stanford.edu
• Problem tylanbpsg 2002-09-20 17:07:43: Uniformity across wafer ~20%   maurice at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-20 07:02:37: cleaning burnbox   seymour at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-20 07:02:37: cleaning burnbox   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-20 08:48:50: Uniformity not uniform   maurice at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-20 08:48:50: Uniformity not uniform   mdickey at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-20 10:03:59: Test   mdickey at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-20 10:03:59: Test   maurice at snf.stanford.edu
• Problem tylanbpsg 2002-09-25 19:24:37: tylan bpsg pumpdown   anojeh at snf.stanford.edu
  • Problem tylanbpsg 2002-09-25 19:24:37: tylan bpsg pumpdown   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-26 07:42:05: tube has a leak.   seymour at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-26 07:42:05: tube has a leak.   seymour at snf.stanford.edu
• Shutdown tylanbpsg 2002-09-26 10:05:50: testing after repair   seymour at snf.stanford.edu
  • Shutdown tylanbpsg 2002-09-26 10:05:50: testing after repair   seymour at snf.stanford.edu

Last message date: Thu Sep 26 11:17:41 PDT 2002
Archived on: Fri Jan 11 13:15:17 PST 2013

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