From mdickey at snf.stanford.edu Wed Apr 2 08:55:04 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 2, 2003 8:55:04 AM Subject: Comment tylanbpsg 2003-04-02 08:55:03: Report Comment for tylanbpsg Message-ID: Pull and clean is done. Process needs to confer with maint. about coating and testing From gladys at snf.stanford.edu Wed Apr 2 06:19:07 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Apr 2, 2003 6:19:07 PM Subject: Shutdown tylanbpsg 2003-03-31 17:09:25: Report Clear for tylanbpsg Message-ID: testrun completed...uniformity not very good, run on your own discretion. Will discuss with maintenance tomorrow From gladys at snf.stanford.edu Wed Apr 2 06:19:19 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Apr 2, 2003 6:19:19 PM Subject: Problem tylanbpsg 2003-03-31 09:21:55: Report Clear for tylanbpsg Message-ID: From gladys at snf.stanford.edu Wed Apr 2 06:21:30 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Apr 2, 2003 6:21:30 PM Subject: Problem tylanbpsg 2003-04-02 18:21:29: Report Problem for tylanbpsg Message-ID: Uniformity is not very good, 8-13% thicker at the bottom to the top. Please use at your own discretion. Will discuss with maintenance tomorrow for a possible retest. From gladys at snf.stanford.edu Thu Apr 3 10:30:58 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Apr 3, 2003 10:30:58 AM Subject: Problem tylanbpsg 2003-04-02 18:21:29: Report Clear for tylanbpsg Message-ID: 3rd run came out good. From tberg at snf.stanford.edu Fri Apr 4 06:25:18 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Apr 4, 2003 6:25:18 AM Subject: Shutdown tylanbpsg 2003-04-04 06:25:18: Report Shutdown for tylanbpsg Message-ID: burn box clean From mdickey at snf.stanford.edu Fri Apr 4 08:56:18 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 4, 2003 8:56:18 AM Subject: Shutdown tylanbpsg 2003-04-04 06:25:18: Report Clear for tylanbpsg Message-ID: Burnbox back up From hermosillo at snf.stanford.edu Wed Apr 9 10:15:35 2003 From: hermosillo at snf.stanford.edu (hermosillo at snf.stanford.edu) Date: Apr 9, 2003 10:15:35 PM Subject: Problem tylanbpsg 2003-04-09 22:15:34: Report Problem for tylanbpsg Message-ID: non-metal vacuum wand broken during loading of clean dummies. From mdickey at snf.stanford.edu Thu Apr 10 06:49:24 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Apr 10, 2003 6:49:24 AM Subject: Problem tylanbpsg 2003-04-09 22:15:34: Report Clear for tylanbpsg Message-ID: From jenwang at snf.stanford.edu Sat Apr 19 02:54:20 2003 From: jenwang at snf.stanford.edu (jenwang at snf.stanford.edu) Date: Apr 19, 2003 2:54:20 PM Subject: Problem tylanbpsg 2003-04-19 14:54:19: PRCPR HIGH at step 30 Message-ID: The values of PRCPR at step 30, 35 amd the depositon step are too high. From tberg at snf.stanford.edu Mon Apr 21 06:16:06 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Apr 21, 2003 6:16:06 AM Subject: Shutdown tylanbpsg 2003-04-21 06:16:03: Report Shutdown for tylanbpsg Message-ID: THermco tie in From seymour at snf.stanford.edu Wed Apr 30 11:20:55 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 30, 2003 11:20:55 AM Subject: Problem tylanbpsg 2003-04-19 14:54:19: Report Clear for tylanbpsg Message-ID: replaced pump and checked base pressure and leak rate and they are good. From seymour at snf.stanford.edu Wed Apr 30 11:22:09 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 30, 2003 11:22:09 AM Subject: Shutdown tylanbpsg 2003-04-21 06:16:03: Report Clear for tylanbpsg Message-ID: The Thermco tie in is completed. Tube has had a BOT run and needs a test prior to release. From seymour at snf.stanford.edu Wed Apr 30 11:22:43 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 30, 2003 11:22:43 AM Subject: Shutdown tylanbpsg 2003-04-30 11:22:36: Report Shutdown for tylanbpsg Message-ID: Needs test after repair and the thermco tie in. From maurice at snf.stanford.edu Wed Apr 30 04:12:51 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Apr 30, 2003 4:12:51 PM Subject: Shutdown tylanbpsg 2003-04-30 11:22:36: Report Clear for tylanbpsg Message-ID: LTO400 5min test good. Expected 1100A. Got 1187A. Uniformity 9.2% on test wafer. Green light