From crichter at snf.stanford.edu Wed Jul 2 12:07:35 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Jul 2, 2003 12:07:35 PM Subject: Problem tylanbpsg 2003-07-02 12:07:34: silver and white particles Message-ID: found silvery and white particles at the bottom of LTO quartz holders. Noticed some white particles on the wafers after run. Tube has SiO2 flakes From mdickey at snf.stanford.edu Wed Jul 2 02:39:43 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Jul 2, 2003 2:39:43 PM Subject: Shutdown tylanbpsg 2003-07-02 14:39:42: Report Shutdown for tylanbpsg Message-ID: Down for test after injector change and paddle adjustment From latta at snf.stanford.edu Wed Jul 2 06:12:05 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 2, 2003 6:12:05 PM Subject: Shutdown tylanbpsg 2003-07-02 14:39:42: Report Clear for tylanbpsg Message-ID: Uniformity still not good. Front to back numbers (within a wafer) are; 59%, 6.4%(?!), 33%, 24%, 27% and 41%. Across the laod is 57%. Released with cautionary "Use at your own risk!" From latta at snf.stanford.edu Wed Jul 2 06:15:33 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 2, 2003 6:15:33 PM Subject: Problem tylanbpsg 2003-07-02 12:07:34: Report Clear for tylanbpsg Message-ID: Injector changed, cantilevers adjusted, test run. No particles found on wafers. From mdickey at snf.stanford.edu Thu Jul 3 02:31:05 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Jul 3, 2003 2:31:05 PM Subject: Shutdown tylanbpsg 2003-07-03 14:31:00: Report Shutdown for tylanbpsg Message-ID: Looking into uniformity problems From seymour at snf.stanford.edu Mon Jul 7 11:11:01 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 7, 2003 11:11:01 AM Subject: Shutdown tylanbpsg 2003-07-03 14:31:00: Report Clear for tylanbpsg Message-ID: gas flow checks completed. needs test From seymour at snf.stanford.edu Mon Jul 7 11:12:10 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 7, 2003 11:12:10 AM Subject: Shutdown tylanbpsg 2003-07-07 11:12:09: Report Shutdown for tylanbpsg Message-ID: needs test From maurice at snf.stanford.edu Wed Jul 9 02:37:37 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 9, 2003 2:37:37 PM Subject: Shutdown tylanbpsg 2003-07-07 11:12:09: Report Clear for tylanbpsg Message-ID: test complete. iniformity good. SiH4 flow=155 O2 flow=136 refractive index=1.45 etchrate good From maurice at snf.stanford.edu Wed Jul 9 02:38:15 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 9, 2003 2:38:15 PM Subject: Problem tylanbpsg 2003-06-30 14:23:26: Report Clear for tylanbpsg Message-ID: iniformity good From maurice at snf.stanford.edu Wed Jul 9 15:02:18 2003 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 09 Jul 2003 15:02:18 -0700 Subject: New gas flows Message-ID: <3F0C90EA.5DDE8235@snf.stanford.edu> TylanBPSG users, We had a failure of the SiH4 mass flow controller. The MFC has been calibrated and the flows of the O2 and the SiH4 have been adjusted so that the programs give the same results as they did before the failure. There is now a new LTO recipe disk at the Tycom that contains the recipes that we know are used frequently. If you do not see your recipe on the new disk send Gladys and me an email (please send it to both of us). If you are using a recipe that has variables for O2 and SiH4, we suggest : SiH4=155 O2=136 Also, with the new flows, the process pressure is lower. So don't be alarmed. From maurice at snf.stanford.edu Wed Jul 9 16:57:22 2003 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 09 Jul 2003 16:57:22 -0700 Subject: tube free now ...testing done Message-ID: <3F0CABE2.F28E392C@snf.stanford.edu> From zappe at snf.stanford.edu Thu Jul 10 06:16:14 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 10, 2003 6:16:14 AM Subject: Problem tylanbpsg 2003-07-10 06:16:10: PSG400 recipe is missing Message-ID: From maurice at snf.stanford.edu Thu Jul 10 10:28:38 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 10, 2003 10:28:38 AM Subject: Problem tylanbpsg 2003-07-10 06:16:10: Report Clear for tylanbpsg Message-ID: program added to disk From zappe at snf.stanford.edu Fri Jul 11 01:38:17 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 11, 2003 1:38:17 AM Subject: Problem tylanbpsg 2003-07-11 01:38:16: Non-uniformity - PSG400 Message-ID: PSG400 1h40m resulted in a thickness ranging from 1.8 to 3.2 um. From hsiung at snf.stanford.edu Tue Jul 15 04:39:05 2003 From: hsiung at snf.stanford.edu (hsiung at snf.stanford.edu) Date: Jul 15, 2003 4:39:05 PM Subject: Problem tylanbpsg 2003-07-15 16:39:04: Report Problem for tylanbpsg Message-ID: the slots of center nonmetal boats are getting so wide that wafers are touched each other back to back. From tberg at snf.stanford.edu Fri Jul 18 06:38:59 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jul 18, 2003 6:38:59 AM Subject: Problem tylanbpsg 2003-07-11 01:38:16: Report Clear for tylanbpsg Message-ID: uniformity is ok on standard processes From tberg at snf.stanford.edu Wed Jul 23 02:52:29 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jul 23, 2003 2:52:29 PM Subject: Shutdown tylanbpsg 2003-07-23 14:52:28: Report Shutdown for tylanbpsg Message-ID: Shutdown to cool for pull and clean From maurice at snf.stanford.edu Fri Jul 25 04:49:40 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 25, 2003 4:49:40 PM Subject: Shutdown tylanbpsg 2003-07-23 14:52:28: Report Clear for tylanbpsg Message-ID: pulled,cleaned,coated,tested. green light From maurice at snf.stanford.edu Fri Jul 25 04:50:50 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 25, 2003 4:50:50 PM Subject: Problem tylanbpsg 2003-07-15 16:39:04: Report Clear for tylanbpsg Message-ID: boats replaced From xiangli at snf.stanford.edu Sat Jul 26 08:23:41 2003 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Jul 26, 2003 8:23:41 PM Subject: Problem tylanbpsg 2003-07-26 20:23:40: PSG400 recipe missing Message-ID: For the person who erased the recipe, please be responsible to user of this recipe and notice us why it is erased and where and when we could find its replacement. Thanks. From ychliu at snf.stanford.edu Sun Jul 27 09:18:20 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Jul 27, 2003 9:18:20 PM Subject: Shutdown tylanbpsg 2003-07-27 21:18:20: MFS error 08 Message-ID: cannot pump down. From mdickey at snf.stanford.edu Mon Jul 28 06:57:12 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Jul 28, 2003 6:57:12 AM Subject: Shutdown tylanbpsg 2003-07-28 06:57:10: Report Shutdown for tylanbpsg Message-ID: Need to replace broken sheath From tberg at snf.stanford.edu Mon Jul 28 07:55:37 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jul 28, 2003 7:55:37 AM Subject: Shutdown tylanbpsg 2003-07-27 21:18:20: Report Clear for tylanbpsg Message-ID: broken cantilever sheath-replaced From tberg at snf.stanford.edu Mon Jul 28 07:56:22 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jul 28, 2003 7:56:22 AM Subject: Shutdown tylanbpsg 2003-07-28 06:57:10: Report Clear for tylanbpsg Message-ID: Broken cantilever sheath-replaced Gladys running and will advise From tberg at snf.stanford.edu Mon Jul 28 07:57:24 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jul 28, 2003 7:57:24 AM Subject: Comment tylanbpsg 2003-07-28 07:57:23: Report Comment for tylanbpsg Message-ID: cantilever sheath was broken-it was replaced and Gladys is running and will advise From uli at snf.stanford.edu Mon Jul 28 01:39:37 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Jul 28, 2003 1:39:37 PM Subject: Problem tylanbpsg 2003-07-26 20:23:40: Report Clear for tylanbpsg Message-ID: Test run completed. From gladys at snf.stanford.edu Tue Jul 29 03:31:48 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jul 29, 2003 3:31:48 PM Subject: Shutdown tylanbpsg 2003-07-29 15:31:48: Report Shutdown for tylanbpsg Message-ID: burnbox is down From seymour at snf.stanford.edu Tue Jul 29 03:54:28 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 29, 2003 3:54:28 PM Subject: Shutdown tylanbpsg 2003-07-29 15:31:48: Report Clear for tylanbpsg Message-ID: replaced breaker with a fuse, burn box is up to temp From gladys at snf.stanford.edu Tue Jul 29 04:14:14 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jul 29, 2003 4:14:14 PM Subject: Shutdown tylanbpsg 2003-07-29 16:14:13: Report Shutdown for tylanbpsg: burnbox is down Message-ID: From maurice at snf.stanford.edu Tue Jul 29 04:57:46 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 29, 2003 4:57:46 PM Subject: Shutdown tylanbpsg 2003-07-29 16:14:13: Report Clear for tylanbpsg Message-ID: clear