Problem tylanbpsg 2003-07-02 12:07:34: silver and white particles

crichter at snf.stanford.edu crichter at snf.stanford.edu
Wed Jul 2 12:07:35 PDT 2003


found silvery and white particles at the bottom of LTO quartz holders. Noticed some white particles on the wafers after run. Tube has SiO2 flakes 




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