Shutdown tylanbpsg 2003-07-07 11:12:09: Report Clear for tylanbpsg

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Jul 9 02:37:37 PDT 2003


test complete.  iniformity good.  
SiH4 flow=155
O2 flow=136
refractive index=1.45
etchrate good




More information about the tylanbpsg-pcs mailing list