From hsiung at snf.stanford.edu  Wed Jun  4 03:14:27 2003
From: hsiung at snf.stanford.edu (hsiung at snf.stanford.edu)
Date: Jun 4, 2003 3:14:27 PM
Subject: Problem tylanbpsg 2003-06-04 15:14:26: Report Problem for tylanbpsg
Message-ID: <mailman.486.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

both ends of the tube start some flaking. tube looks yellowish.



From mdickey at snf.stanford.edu  Thu Jun  5 06:38:35 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 5, 2003 6:38:35 AM
Subject: Problem tylanbpsg 2003-06-04 15:14:26: Report Clear for tylanbpsg
Message-ID: <mailman.487.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Vacuumed up very minor flaking



From hansen at snf.stanford.edu  Mon Jun  9 04:29:53 2003
From: hansen at snf.stanford.edu (hansen at snf.stanford.edu)
Date: Jun 9, 2003 4:29:53 PM
Subject: Problem tylanbpsg 2003-06-09 16:29:52: Door not ready to come out after dep.
Message-ID: <mailman.488.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

The door would not come out after step 110 in PSG400.  Maybe there was stil some vacuum in the tube.  After waiting an additional 10 minutes, I was able to open the door manually.



From mdickey at snf.stanford.edu  Tue Jun 10 06:48:50 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 10, 2003 6:48:50 AM
Subject: Problem tylanbpsg 2003-06-09 16:29:52: Report Clear for tylanbpsg
Message-ID: <mailman.489.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Adjusted cantilever because the flag was past the first sensor



From maurice at snf.stanford.edu  Thu Jun 12 05:21:16 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Jun 12, 2003 5:21:16 PM
Subject: Comment tylanbpsg 2003-06-12 17:21:16: Report Comment for tylanbpsg
Message-ID: <mailman.490.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Yellow deposits flaking off rails



From mdickey at snf.stanford.edu  Fri Jun 13 07:28:43 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 13, 2003 7:28:43 AM
Subject: Comment tylanbpsg 2003-06-13 07:28:42: Report Comment for tylanbpsg
Message-ID: <mailman.491.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

vacuumed up loose flakes, back in pump program



From mdickey at snf.stanford.edu  Wed Jun 18 07:22:00 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 18, 2003 7:22:00 AM
Subject: Shutdown tylanbpsg 2003-06-18 07:21:59: Report Shutdown for tylanbpsg
Message-ID: <mailman.492.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Wed Jun 18 01:21:21 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 18, 2003 1:21:21 PM
Subject: Comment tylanbpsg 2003-06-18 13:21:20: Report Comment for tylanbpsg
Message-ID: <mailman.493.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Pull and clean is done. Currently in coat recipe



From maurice at snf.stanford.edu  Fri Jun 20 12:03:52 2003
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Fri, 20 Jun 2003 12:03:52 -0700
Subject: LTO uniformity high
Message-ID: <3EF35A98.CEF84F97@snf.stanford.edu>

wafer#          center          top          bottom
right          left       uniformity
1                      4673          5388          4145
4088          5203          27.6%
2                      4860         5154          4145
4455          4542          14.8%
4                      4461          5256          4067
4368          4591          25.1%
5                      4341          5163         3662
4072         4072          34%

Tops much thicker than bottoms.  red light



From maurice at snf.stanford.edu  Fri Jun 20 12:10:17 2003
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Fri, 20 Jun 2003 12:10:17 -0700
Subject: [Fwd: LTO uniformity high]  reformatted
Message-ID: <3EF35C19.E307A3D6@snf.stanford.edu>

(Sorry for the formatting the first time)
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From: Maurice Stevens <maurice at snf.stanford.edu>
Subject: LTO uniformity high
Date: Fri, 20 Jun 2003 12:08:26 -0700
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From maurice at snf.stanford.edu  Fri Jun 20 04:47:23 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Jun 20, 2003 4:47:23 PM
Subject: Shutdown tylanbpsg 2003-06-18 07:21:59: Report Clear for tylanbpsg
Message-ID: <mailman.494.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

testing unifornity



From maurice at snf.stanford.edu  Fri Jun 20 04:48:57 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Jun 20, 2003 4:48:57 PM
Subject: Problem tylanbpsg 2003-06-20 16:48:55: Report Problem for tylanbpsg
Message-ID: <mailman.495.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Uniformity ~20% across wafers.  It is normally  9 to 12%.



From tkato at snf.stanford.edu  Fri Jun 20 11:15:39 2003
From: tkato at snf.stanford.edu (tkato at snf.stanford.edu)
Date: Jun 20, 2003 11:15:39 PM
Subject: Problem tylanbpsg 2003-06-20 23:15:38: Report Problem for tylanbpsg
Message-ID: <mailman.496.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

quartz lid has some cracks.
(front end: a few cracks, back end: 1 crack & wear mark)
I'm not sure how is initial setting of this lid.
sorry if it is not problem, just initial setting.



From yyao at snf.stanford.edu  Sat Jun 21 03:33:47 2003
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Jun 21, 2003 3:33:47 PM
Subject: Problem tylanbpsg 2003-06-21 15:33:47: Report Problem for tylanbpsg
Message-ID: <mailman.497.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

powder on the left end of boat and cover



From maurice at snf.stanford.edu  Mon Jun 23 11:24:51 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Jun 23, 2003 11:24:51 AM
Subject: Problem tylanbpsg 2003-06-20 23:15:38: Report Clear for tylanbpsg
Message-ID: <mailman.498.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

The cracks in the lid were there initially.  It will not change the process.  
Thank you for noting it.  Anything that seems unusual should be asked about.



From mdickey at snf.stanford.edu  Tue Jun 24 10:45:55 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 24, 2003 10:45:55 AM
Subject: Shutdown tylanbpsg 2003-06-24 10:45:54: Report Shutdown for tylanbpsg
Message-ID: <mailman.499.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Down for injector change and leak checks



From mdickey at snf.stanford.edu  Thu Jun 26 10:17:01 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jun 26, 2003 10:17:01 AM
Subject: Comment tylanbpsg 2003-06-26 10:17:00: Report Comment for tylanbpsg
Message-ID: <mailman.500.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Replaced cantilever quartzware. Leak check was good. In 
pump program and waiting for test



From tberg at snf.stanford.edu  Thu Jun 26 11:49:40 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 26 Jun 2003 11:49:40 -0700
Subject: Test in LTO
Message-ID: <3EFB4044.A210D7FF@snf.stanford.edu>

There is a coat in progress that has a 1 hour dep started at 12:15 so it
should be out at 2:15



From tberg at snf.stanford.edu  Thu Jun 26 12:49:48 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jun 26, 2003 12:49:48 PM
Subject: Comment tylanbpsg 2003-06-26 12:49:39: Report Comment for tylanbpsg
Message-ID: <mailman.501.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

The coat on LTO actually started at 11:45 so it should be out at 1:45 if there actually is only an hour of overhead.ted



From tberg at snf.stanford.edu  Thu Jun 26 01:50:30 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jun 26, 2003 1:50:30 PM
Subject: Comment tylanbpsg 2003-06-26 13:50:30: Report Comment for tylanbpsg
Message-ID: <mailman.502.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Sorry my bad, i put in 1 minute not one hour for dep the first time and there was no problem with that coat. the one hour run is in step 45 now and should be in dep in 10 minutes



From gladys at snf.stanford.edu  Thu Jun 26 06:47:56 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jun 26, 2003 6:47:56 PM
Subject: Shutdown tylanbpsg 2003-06-24 10:45:54: Report Clear for tylanbpsg
Message-ID: <mailman.503.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

testrun completed, uniformity is not good, use at your own discretion



From gladys at snf.stanford.edu  Thu Jun 26 06:48:33 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jun 26, 2003 6:48:33 PM
Subject: Problem tylanbpsg 2003-06-21 15:33:47: Report Clear for tylanbpsg
Message-ID: <mailman.504.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

tube cleaned



From gladys at snf.stanford.edu  Thu Jun 26 06:49:22 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jun 26, 2003 6:49:22 PM
Subject: Problem tylanbpsg 2003-06-20 16:48:55: Report Clear for tylanbpsg
Message-ID: <mailman.505.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

re tested, uniformity still not good, use at your own discretion.



From gladys at snf.stanford.edu  Thu Jun 26 06:52:00 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jun 26, 2003 6:52:00 PM
Subject: Problem tylanbpsg 2003-06-26 18:51:59: Report Problem for tylanbpsg
Message-ID: <mailman.506.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Tube cleaned and re tested..uniformity is still not good, ~27%
from the top to bottom.  Use at your own discretion.



From gladys at snf.stanford.edu  Thu Jun 26 06:53:47 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jun 26, 2003 6:53:47 PM
Subject: Problem tylanbpsg 2003-06-26 18:53:46: Report Problem for tylanbpsg
Message-ID: <mailman.507.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Uniformity is ~27 from top to bottom, use at your own discretion



From tberg at snf.stanford.edu  Mon Jun 30 02:19:48 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jun 30, 2003 2:19:48 PM
Subject: Problem tylanbpsg 2003-06-26 18:51:59: Report Clear for tylanbpsg
Message-ID: <mailman.508.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

duplicate entry see remaining



From tberg at snf.stanford.edu  Mon Jun 30 02:21:08 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jun 30, 2003 2:21:08 PM
Subject: Problem tylanbpsg 2003-06-26 18:53:46: Report Clear for tylanbpsg
Message-ID: <mailman.509.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

duplicate entry



From tberg at snf.stanford.edu  Mon Jun 30 02:21:41 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jun 30, 2003 2:21:41 PM
Subject: Comment tylanbpsg 2003-06-30 14:21:40: Report Comment for tylanbpsg
Message-ID: <mailman.510.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

bad uniformity



From tberg at snf.stanford.edu  Mon Jun 30 02:23:26 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jun 30, 2003 2:23:26 PM
Subject: Problem tylanbpsg 2003-06-30 14:23:26: Report Problem for tylanbpsg
Message-ID: <mailman.511.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

bad uniformity user discression