From bob101 at snf.stanford.edu Sun May 4 09:53:44 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 4, 2003 9:53:44 PM Subject: Problem tylanbpsg 2003-05-04 21:53:43: Report Problem for tylanbpsg Message-ID: the depo presure seems high, about 355, the quality of film is bad, there are gray clouds on film. From bob101 at snf.stanford.edu Sun May 4 11:08:53 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 4, 2003 11:08:53 PM Subject: Problem tylanbpsg 2003-05-04 23:08:51: Report Problem for tylanbpsg Message-ID: The measured thickness is less than target. the gray cloud under microscope are dots about 2000 Angstrom high. From tberg at snf.stanford.edu Tue May 6 07:29:41 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 6, 2003 7:29:41 AM Subject: Shutdown tylanbpsg 2003-05-06 07:29:40: Report Shutdown for tylanbpsg Message-ID: Pump not pumping From tberg at snf.stanford.edu Tue May 6 11:59:35 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 6, 2003 11:59:35 AM Subject: Shutdown tylanbpsg 2003-05-06 07:29:40: Report Clear for tylanbpsg Message-ID: Pump replaced baser pressure fgood leak rate good in pump program From bob101 at snf.stanford.edu Wed May 7 12:09:11 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 7, 2003 12:09:11 AM Subject: Problem tylanbpsg 2003-05-07 00:09:11: no clouds on wafer now Message-ID: it looks like mirrow. From maurice at snf.stanford.edu Wed May 7 08:59:52 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 7, 2003 8:59:52 AM Subject: Problem tylanbpsg 2003-05-07 00:09:11: Report Clear for tylanbpsg Message-ID: Bob reports101:no clouds on wafer now From maurice at snf.stanford.edu Wed May 7 09:00:07 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 7, 2003 9:00:07 AM Subject: Problem tylanbpsg 2003-05-04 23:08:51: Report Clear for tylanbpsg Message-ID: Bob reports101:no clouds on wafer now From maurice at snf.stanford.edu Wed May 7 09:00:59 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 7, 2003 9:00:59 AM Subject: Problem tylanbpsg 2003-05-04 21:53:43: Report Clear for tylanbpsg Message-ID: Bob101 reports: no clouds on wafer now From hermosillo at snf.stanford.edu Wed May 7 09:48:17 2003 From: hermosillo at snf.stanford.edu (hermosillo at snf.stanford.edu) Date: May 7, 2003 9:48:17 AM Subject: Problem tylanbpsg 2003-05-07 09:48:16: Report Problem for tylanbpsg Message-ID: the tube did not come out after pressing the recipe run button. the tube was fully vented before the recipe run button was pressed. the program was stuck on step 5. we had to manually move tube out and then load wafers. after this we pushed alarm ack and the tube went in and the process ran normally. From seymour at snf.stanford.edu Thu May 8 08:20:11 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2003 8:20:11 AM Subject: Problem tylanbpsg 2003-05-07 09:48:16: Report Clear for tylanbpsg Message-ID: stopped pump recipe with alarm ack. Vented tube. Loaded LTO400 and pushed run. Tube opened and closed in auto as it should, and proceded to continue on the recipe. From tberg at snf.stanford.edu Tue May 13 07:01:23 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 13, 2003 7:01:23 AM Subject: Shutdown tylanbpsg 2003-05-13 07:01:23: Report Shutdown for tylanbpsg Message-ID: Pull and clean-breaker off From mdickey at snf.stanford.edu Wed May 14 10:19:08 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: May 14, 2003 10:19:08 AM Subject: Shutdown tylanbpsg 2003-05-13 07:01:23: Report Clear for tylanbpsg Message-ID: Pull and clean is done. Pump replaced. Maurice to do a coat From maurice at snf.stanford.edu Wed May 14 04:56:38 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 14, 2003 4:56:38 PM Subject: Comment tylanbpsg 2003-05-14 16:56:37: Report Comment for tylanbpsg Message-ID: test good after tube pull. Uniformity normal...10.8% From yishida at snf.stanford.edu Sun May 18 01:43:12 2003 From: yishida at snf.stanford.edu (yishida at snf.stanford.edu) Date: May 18, 2003 1:43:12 AM Subject: Problem tylanbpsg 2003-05-18 01:43:10: Report Problem for tylanbpsg Message-ID: Part of the wire to pull out the boats almost breaks. From mdickey at snf.stanford.edu Mon May 19 07:00:14 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: May 19, 2003 7:00:14 AM Subject: Problem tylanbpsg 2003-05-18 01:43:10: Report Clear for tylanbpsg Message-ID: Cable has been replaced From gladys at snf.stanford.edu Wed May 21 03:35:22 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: May 21, 2003 3:35:22 PM Subject: Shutdown tylanbpsg 2003-05-21 15:35:21: Report Shutdown for tylanbpsg Message-ID: Shutdown for some maintenance work. From maurice at snf.stanford.edu Fri May 23 03:45:30 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 23, 2003 3:45:30 PM Subject: Shutdown tylanbpsg 2003-05-21 15:35:21: Report Clear for tylanbpsg Message-ID: Pump changed. Tube cleaned and coated. Dummies replaced. Test good. Uniformity normal~11.5% green light From bob101 at snf.stanford.edu Thu May 29 10:27:51 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 29, 2003 10:27:51 PM Subject: Problem tylanbpsg 2003-05-29 22:27:50: Report Problem for tylanbpsg Message-ID: The door does not like to come out and move in. From tberg at snf.stanford.edu Fri May 30 06:56:16 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 30, 2003 6:56:16 AM Subject: Shutdown tylanbpsg 2003-05-30 06:56:16: Report Shutdown for tylanbpsg Message-ID: liner in burn box cracked . down for replacement From mdickey at snf.stanford.edu Fri May 30 07:08:04 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: May 30, 2003 7:08:04 AM Subject: Shutdown tylanbpsg 2003-05-30 06:56:16: Report Clear for tylanbpsg Message-ID: Tightened up pulley on boat motor, ready to use From mdickey at snf.stanford.edu Fri May 30 07:08:20 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: May 30, 2003 7:08:20 AM Subject: Problem tylanbpsg 2003-05-29 22:27:50: Report Clear for tylanbpsg Message-ID: Tightened up boat notor pulley, ready to use