Problem tylanbpsg 2003-05-07 09:48:16: Report Problem for tylanbpsg

hermosillo at snf.stanford.edu hermosillo at snf.stanford.edu
Wed May 7 09:48:17 PDT 2003


the tube did not come out after pressing the recipe run button.  the tube was fully vented before the recipe run button was pressed.  the program was stuck on step 5.  we had to manually move tube out and then load wafers.  after this we pushed alarm ack and the tube went in and the process ran normally.




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