Problem tylanbpsg 2003-05-07 09:48:16: Report Clear for tylanbpsg

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu May 8 08:20:11 PDT 2003


stopped pump recipe with alarm ack. Vented tube. Loaded LTO400 and pushed run. Tube opened and closed in auto as it should, and proceded to continue on the recipe.




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