From tberg at snf.stanford.edu Mon Nov 10 06:44:21 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Nov 2003 06:44:21 -0800 Subject: Shutdown tylanbpsg 2003-11-10 06:44:20: Report Shutdown for tylanbpsg Message-ID: LTO pump out of oil,oil all over-checking it out From mdickey at snf.stanford.edu Mon Nov 10 08:05:52 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Nov 2003 08:05:52 -0800 Subject: Shutdown tylanbpsg 2003-11-10 06:44:20: Report Shutdown for tylanbpsg Message-ID: Refilled pump oil From mdickey at snf.stanford.edu Mon Nov 10 08:06:13 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Nov 2003 08:06:13 -0800 Subject: Comment tylanbpsg 2003-10-27 14:24:04: Report Comment for tylanbpsg Message-ID: Problem cleared From bwacker at snf.stanford.edu Thu Nov 13 18:33:45 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Thu, 13 Nov 2003 18:33:45 -0800 Subject: Problem tylanbpsg 2003-11-13 18:33:44: Could not run Message-ID: LTO tube cannot pump down, it failed 4 times on gross leakcheck From bwacker at snf.stanford.edu Thu Nov 13 20:27:19 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Thu, 13 Nov 2003 20:27:19 -0800 Subject: Shutdown tylanbpsg 2003-11-13 20:27:19: not pumping down Message-ID: From tberg at snf.stanford.edu Fri Nov 14 10:05:05 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Nov 2003 10:05:05 -0800 Subject: Shutdown tylanbpsg 2003-11-13 20:27:19: not pumping down Message-ID: Replaced diode on Gate valve From tberg at snf.stanford.edu Fri Nov 14 10:07:09 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Nov 2003 10:07:09 -0800 Subject: Problem tylanbpsg 2003-11-13 18:33:44: Could not run Message-ID: Replaceed diode on gate valve-leak checked From daesung at snf.stanford.edu Sat Nov 15 04:47:04 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sat, 15 Nov 2003 04:47:04 -0800 Subject: Problem tylanbpsg 2003-11-15 04:47:03: The boat lid is broken into two parts. Message-ID: The boat lid was suddenly and naturally broken into two parts with some sound on clean room papers. There was an initial crack in the boat lid when I started the process. From xzhuan1 at snf.stanford.edu Sat Nov 15 14:13:13 2003 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sat, 15 Nov 2003 14:13:13 -0800 Subject: Problem tylanbpsg 2003-11-15 14:13:12: templ reading too high Message-ID: Templ read 560 degrees in psg400 process. From tberg at snf.stanford.edu Mon Nov 17 07:54:31 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Nov 2003 07:54:31 -0800 Subject: Shutdown tylanbpsg 2003-11-17 07:54:30: Report Shutdown for tylanbpsg Message-ID: Down for pull pull and clean From mdickey at snf.stanford.edu Mon Nov 17 12:50:37 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Nov 2003 12:50:37 -0800 Subject: Comment tylanbpsg 2003-11-17 12:50:36: Report Comment for tylanbpsg Message-ID: Pull and clean is done. Currently in coat recipe. Then will need a test From mdickey at snf.stanford.edu Mon Nov 17 12:51:01 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Nov 2003 12:51:01 -0800 Subject: Problem tylanbpsg 2003-11-15 04:47:03: The boat lid is broken into two parts. Message-ID: Boat has been replaced From maurice at snf.stanford.edu Tue Nov 18 12:27:07 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Nov 2003 12:27:07 -0800 Subject: Comment tylanbpsg 2003-11-17 12:50:36: Report Comment for tylanbpsg Message-ID: test good. Green light From maurice at snf.stanford.edu Tue Nov 18 12:27:57 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Nov 2003 12:27:57 -0800 Subject: Shutdown tylanbpsg 2003-11-17 07:54:30: Report Shutdown for tylanbpsg Message-ID: pulled ,cleaned,coated,tested From maurice at snf.stanford.edu Tue Nov 18 12:28:14 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Nov 2003 12:28:14 -0800 Subject: Problem tylanbpsg 2003-11-15 14:13:12: templ reading too high Message-ID: logged From crichter at snf.stanford.edu Fri Nov 21 15:14:39 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 21 Nov 2003 15:14:39 -0800 Subject: Problem tylanbpsg 2003-11-21 15:14:38: particles found on wafers with LTO400 Message-ID: Inspected dummy wafer and processed wafers and saw particles (in dark field) that resembled those that were previously on the nitride films. Process was done on 11-19-03 for 9 minutes From seymour at snf.stanford.edu Mon Nov 24 15:07:34 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Nov 2003 15:07:34 -0800 Subject: Problem tylanbpsg 2003-11-21 15:14:38: particles found on wafers with LTO400 Message-ID: event logged