From maurice at snf.stanford.edu  Thu Sep  4 11:42:04 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Sep 4, 2003 11:42:04 AM
Subject: Problem tylanbpsg 2003-09-04 11:42:03: Report Problem for tylanbpsg
Message-ID: <mailman.551.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

The slots on the second boat from the door are etched too wide.  Wafers are leaning.  Users have seen uniformity differences on wafers that lean.



From mdickey at snf.stanford.edu  Thu Sep  4 01:32:04 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Sep 4, 2003 1:32:04 PM
Subject: Problem tylanbpsg 2003-09-04 11:42:03: Report Clear for tylanbpsg
Message-ID: <mailman.552.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Replaced problem wafer boat. Ready for use.



From tberg at snf.stanford.edu  Mon Sep  8 10:40:11 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Sep 8, 2003 10:40:11 AM
Subject: Shutdown tylanbpsg 2003-09-08 10:40:07: Report Shutdown for tylanbpsg
Message-ID: <mailman.553.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

doesn't pump down



From mdickey at snf.stanford.edu  Tue Sep  9 08:48:19 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Sep 9, 2003 8:48:19 AM
Subject: Comment tylanbpsg 2003-09-09 08:48:18: Report Comment for tylanbpsg
Message-ID: <mailman.554.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Replaced damaged tube. Currently running a coat recipe then will need test



From maurice at snf.stanford.edu  Tue Sep  9 03:06:10 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Sep 9, 2003 3:06:10 PM
Subject: Shutdown tylanbpsg 2003-09-08 10:40:07: Report Clear for tylanbpsg
Message-ID: <mailman.555.1357938891.25992.tylanbpsg-pcs@snf.stanford.edu>

Tube pulled and cleaned and coated.  
Uniformity ok.