Problem tylanbpsg 2003-09-04 11:42:03: Report Problem for tylanbpsg

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Sep 4 11:42:04 PDT 2003


The slots on the second boat from the door are etched too wide.  Wafers are leaning.  Users have seen uniformity differences on wafers that lean.




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