From fengj at snf.stanford.edu Wed Aug 4 11:24:23 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Wed, 4 Aug 2004 11:24:23 -0700 Subject: Problem tylanbpsg SNF 2004-08-04 11:24:23: LTO too thin Message-ID: LTO400 is run for 6.5 min, but the thickness is only 308A. Base pressure, leak pressure ,and process pressure are OK, but the gas flow was not paid attention to. From pethe at snf.stanford.edu Thu Aug 5 12:44:16 2004 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Thu, 5 Aug 2004 12:44:16 -0700 Subject: Problem tylanbpsg SNF 2004-08-05 12:44:15: Low Dep Rate Message-ID: Ran a Test Run on the LTO to check for dep rate. The dep rate is significantly reduced. I have listed the process parameters during the run. Test Run LTO400 08/05/2004 Time:00:20:00 Expected Thickness: 4000A Measured Thickness: 1100A Base Pressure:16.1mT Leak Pressure:49mT Deposition Step: Pressure:226.1mT SiH4 Flow Rate: 155 sccm (Expected 155) O2 Flow Rate: 137 sccm (Expected 136) From aokyay at snf.stanford.edu Fri Aug 6 02:28:43 2004 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Fri, 6 Aug 2004 02:28:43 -0700 Subject: Problem tylanbpsg SNF 2004-08-06 02:28:43: no deposition Message-ID: run LTO300 for 20min, no deposition From mtang at snf.stanford.edu Fri Aug 6 07:35:53 2004 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 6 Aug 2004 07:35:53 -0700 Subject: Shutdown tylanbpsg SNF 2004-08-06 07:35:53: Low/no dep rate. Message-ID: From mdickey at snf.stanford.edu Fri Aug 6 09:10:18 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 6 Aug 2004 09:10:18 -0700 Subject: Comment tylanbpsg SNF 2004-08-06 09:10:13: Needs test Message-ID: Replaced both injectors. One was broken. Tube needs a test From tberg at snf.stanford.edu Fri Aug 6 10:33:55 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Aug 2004 10:33:55 -0700 Subject: Problem tylanbpsg SNF 2004-08-04 11:24:23: LTO too thin Message-ID: Problem noted From tberg at snf.stanford.edu Fri Aug 6 10:34:18 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Aug 2004 10:34:18 -0700 Subject: Problem tylanbpsg SNF 2004-08-05 12:44:15: Low Dep Rate Message-ID: Problem Noted From tberg at snf.stanford.edu Fri Aug 6 10:35:04 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Aug 2004 10:35:04 -0700 Subject: Problem tylanbpsg SNF 2004-08-06 02:28:43: no deposition Message-ID: noted From maurice at snf.stanford.edu Fri Aug 6 15:10:03 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Aug 2004 15:10:03 -0700 Subject: Comment tylanbpsg SNF 2004-08-06 09:10:13: Needs test Message-ID: LTO400 dep rate back to normal From maurice at snf.stanford.edu Fri Aug 6 15:11:07 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Aug 2004 15:11:07 -0700 Subject: Shutdown tylanbpsg SNF 2004-08-06 07:35:53: Low/no dep rate. Message-ID: One injector broken. Both injectors replaced. Tested good. From mdickey at snf.stanford.edu Thu Aug 19 06:44:19 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Aug 2004 06:44:19 -0700 Subject: Problem tylanbpsg SNF 2004-08-19 06:44:18: Bottle change Message-ID: No Polydope or Doped Oxide recipes can be run From mdickey at snf.stanford.edu Thu Aug 19 06:45:44 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Aug 2004 06:45:44 -0700 Subject: Problem tylanbpsg SNF 2004-08-19 06:45:43: Bottle change Message-ID: No Oxide doped recipes can be run for the next 24 hours due to a gas bottle change From mdickey at snf.stanford.edu Fri Aug 20 07:54:50 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Aug 2004 07:54:50 -0700 Subject: Problem tylanbpsg SNF 2004-08-19 06:45:43: Bottle change Message-ID: Gas back on line From mdickey at snf.stanford.edu Fri Aug 20 07:54:58 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Aug 2004 07:54:58 -0700 Subject: Problem tylanbpsg SNF 2004-08-19 06:44:18: Bottle change Message-ID: gas back on line From gladys at snf.stanford.edu Wed Aug 25 15:37:52 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 25 Aug 2004 15:37:52 -0700 Subject: Shutdown tylanbpsg SNF 2004-08-25 15:37:52: Failed leak check twice. Message-ID: wafers are still in the tube -gladys From mdickey at snf.stanford.edu Thu Aug 26 07:37:14 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 26 Aug 2004 07:37:14 -0700 Subject: Shutdown tylanbpsg SNF 2004-08-25 15:37:52: Failed leak check twice. Message-ID: Opened up system and nothing was broken. Did a pumpdown and rate of rise and everything was good........base pressure at 40 m.t........rate of rise was 6 m.t. From gladys at snf.stanford.edu Thu Aug 26 14:06:03 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Thu, 26 Aug 2004 14:06:03 -0700 Subject: Shutdown tylanbpsg SNF 2004-08-26 14:06:03: testrun got aborted, high prcpr Message-ID: From tberg at snf.stanford.edu Thu Aug 26 15:01:57 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 Aug 2004 15:01:57 -0700 Subject: Comment tylanbpsg SNF 2004-08-26 15:01:56: Shutdown Message-ID: Pull and clean From mdickey at snf.stanford.edu Fri Aug 27 13:56:46 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 27 Aug 2004 13:56:46 -0700 Subject: Comment tylanbpsg SNF 2004-08-27 13:56:45: Heating up Message-ID: Pull and clean is done. Tube is currently heating up and the coat recipe is loaded From maurice at snf.stanford.edu Fri Aug 27 18:44:41 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 27 Aug 2004 18:44:41 -0700 Subject: Comment tylanbpsg SNF 2004-08-26 15:01:56: Shutdown Message-ID: pulled, cleaned, coated and tested. ok From maurice at snf.stanford.edu Fri Aug 27 18:45:23 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 27 Aug 2004 18:45:23 -0700 Subject: Shutdown tylanbpsg SNF 2004-08-26 14:06:03: testrun got aborted, high prcpr Message-ID: logged. tube pulled and cleaned