Problem tylanbpsg SNF 2004-08-04 11:24:23: LTO too thin

fengj at snf.stanford.edu fengj at snf.stanford.edu
Wed Aug 4 11:24:23 PDT 2004


LTO400 is run for 6.5 min, but the thickness is only 308A. Base pressure, leak pressure ,and process pressure are OK, but the gas flow was not paid attention to.




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