Problem tylanbpsg SNF 2004-08-05 12:44:15: Low Dep Rate

pethe at snf.stanford.edu pethe at snf.stanford.edu
Thu Aug 5 12:44:16 PDT 2004


Ran a Test Run on the LTO to check for dep rate. The dep rate is significantly reduced. I have listed the process parameters during the run.
	Test Run LTO400 08/05/2004
Time:00:20:00
Expected Thickness: 4000A
Measured Thickness: 1100A
Base Pressure:16.1mT	Leak Pressure:49mT
Deposition Step:
Pressure:226.1mT
SiH4 Flow Rate: 155 sccm (Expected 155)
O2 Flow Rate: 137 sccm (Expected 136)




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