From bipin at snf.stanford.edu  Wed Dec  1 19:19:36 2004
From: bipin at snf.stanford.edu (bipin at snf.stanford.edu)
Date: Wed, 1 Dec 2004 19:19:36 -0800
Subject: Problem tylanbpsg SNF 2004-12-01 19:19:35: Flakes from dummies
Message-ID: <mailman.727.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

After the CMOS Run today, there were flakes from the dummies on the tube. The tube needs to be cleaned?



From mdickey at snf.stanford.edu  Thu Dec  2 08:47:39 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 2 Dec 2004 08:47:39 -0800
Subject: Problem tylanbpsg SNF 2004-12-01 19:19:35: Flakes from dummies
Message-ID: <mailman.728.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Vacuumed up loose particles caused by one wafer. Wafer
has been removed



From sanda at snf.stanford.edu  Thu Dec  2 18:01:46 2004
From: sanda at snf.stanford.edu (sanda at snf.stanford.edu)
Date: Thu, 2 Dec 2004 18:01:46 -0800
Subject: Problem tylanbpsg SNF 2004-12-02 18:01:45: flow of PH3 is 0
Message-ID: <mailman.729.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

The flow of PH3 is 0, the set value is 86, though.
Do not use PSG program.



From mcvittie at snf.stanford.edu  Sun Dec  5 11:15:26 2004
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Sun, 5 Dec 2004 11:15:26 -0800
Subject: Shutdown tylanbpsg SNF 2004-12-05 11:15:25: tylanbpsg  --- burn box is down
Message-ID: <mailman.730.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>




From mcvittie at snf.stanford.edu  Sun Dec  5 13:57:37 2004
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Sun, 5 Dec 2004 13:57:37 -0800
Subject: Shutdown tylanbpsg SNF 2004-12-05 11:15:25: tylanbpsg  --- burn box is down
Message-ID: <mailman.731.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon Dec  6 06:32:13 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 6 Dec 2004 06:32:13 -0800
Subject: Problem tylanbpsg SNF 2004-12-02 18:01:45: flow of PH3 is 0
Message-ID: <mailman.732.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Run PH3 manually no problem



From fengj at snf.stanford.edu  Sat Dec 11 00:06:58 2004
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Sat, 11 Dec 2004 00:06:58 -0800
Subject: Shutdown tylanbpsg SNF 2004-12-11 00:06:57: Cannot run PUMP11, Keeps MFS Alarm.
Message-ID: <mailman.733.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon Dec 13 07:52:11 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 13 Dec 2004 07:52:11 -0800
Subject: Shutdown tylanbpsg SNF 2004-12-11 00:06:57: Cannot run PUMP11, Keeps MFS Alarm.
Message-ID: <mailman.734.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Replaced pump leak rate OK



From tberg at snf.stanford.edu  Fri Dec 17 06:20:56 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 17 Dec 2004 06:20:56 -0800
Subject: Shutdown tylanbpsg SNF 2004-12-17 06:20:54: pull and clean
Message-ID: <mailman.735.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

down for scheduled p and c