From maurice at snf.stanford.edu Thu Jul 1 11:26:54 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2004 11:26:54 -0700 Subject: Comment tylanbpsg SNF 2004-06-29 13:23:35: the tubehas a leak and will not pass leakcheck Message-ID: tube pulled, cleaned, coated and tested ok From maurice at snf.stanford.edu Thu Jul 1 11:27:18 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2004 11:27:18 -0700 Subject: Shutdown tylanbpsg SNF 2004-06-29 13:18:43: high leak rate Message-ID: pulled and cleaned From maurice at snf.stanford.edu Thu Jul 1 11:27:35 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2004 11:27:35 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-01 11:27:34: failed pump program Message-ID: From mdickey at snf.stanford.edu Thu Jul 1 13:00:11 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 1 Jul 2004 13:00:11 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-01 11:27:34: failed pump program Message-ID: I started the pump program. The controller was in manual because of the oil change. From beckwith at snf.stanford.edu Thu Jul 1 19:48:10 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Thu, 1 Jul 2004 19:48:10 -0700 Subject: Problem tylanbpsg SNF 2004-07-01 19:48:09: hazy spot on my wafer Message-ID: same hazy stuff on the dummy wafer that was in the same slot. I left my wafer and a not on Mike's desk. From seymour at snf.stanford.edu Tue Jul 6 13:46:06 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 6 Jul 2004 13:46:06 -0700 Subject: Comment tylanbpsg SNF 2004-07-06 13:46:05: test needed and will be performed by Gladys Message-ID: From gladys at snf.stanford.edu Tue Jul 6 16:48:34 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 6 Jul 2004 16:48:34 -0700 Subject: Comment tylanbpsg SNF 2004-07-06 13:46:05: test needed and will be performed by Gladys Message-ID: Ran LTO400 for 20 min, wafers looked clean. From gladys at snf.stanford.edu Tue Jul 6 16:54:13 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 6 Jul 2004 16:54:13 -0700 Subject: Problem tylanbpsg SNF 2004-07-01 19:48:09: hazy spot on my wafer Message-ID: test run was ok From wtpark at snf.stanford.edu Thu Jul 8 11:14:01 2004 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Thu, 8 Jul 2004 11:14:01 -0700 Subject: Problem tylanbpsg SNF 2004-07-08 11:14:00: weak cable? Message-ID: The program didn't go to the next step after "boat in" because "DNTLK=OFF". I had to to give a little manual push for the interlock to trigger. From seymour at snf.stanford.edu Fri Jul 9 15:00:13 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Jul 2004 15:00:13 -0700 Subject: Problem tylanbpsg SNF 2004-07-08 11:14:00: weak cable? Message-ID: Ted tightened the pully set screw and checked loader operation From barlian at snf.stanford.edu Sat Jul 10 23:26:18 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sat, 10 Jul 2004 23:26:18 -0700 Subject: Comment tylanbpsg SNF 2004-07-10 23:26:17: tube Message-ID: the tube doesn't seem to move in and out smoothly... From seymour at snf.stanford.edu Wed Jul 14 08:58:07 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Jul 2004 08:58:07 -0700 Subject: Comment tylanbpsg SNF 2004-07-10 23:26:17: tube Message-ID: replaced loader drive set screw with socket head screw. From mdickey at snf.stanford.edu Thu Jul 15 13:05:36 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jul 2004 13:05:36 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-15 13:05:35: Burnbox clean Message-ID: Tube can not be used until burnbox is cleaned From mdickey at snf.stanford.edu Thu Jul 15 14:49:49 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jul 2004 14:49:49 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-15 13:05:35: Burnbox clean Message-ID: Burnbox clean completed From mdickey at snf.stanford.edu Mon Jul 26 14:08:46 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 26 Jul 2004 14:08:46 -0700 Subject: Comment tylanbpsg SNF 2004-07-26 14:08:45: Needs test Message-ID: Tube has been pulled, cleaned and coated. Needs test. From maurice at snf.stanford.edu Mon Jul 26 14:10:20 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jul 2004 14:10:20 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-26 14:10:19: testing process after pull Message-ID: From maurice at snf.stanford.edu Mon Jul 26 17:30:30 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jul 2004 17:30:30 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-26 17:30:29: failed leak check Message-ID: LTO failed leakcheck 3 times. Test wafers are loaded. If you get it to work, please run the coat program for 00:20:00. I'll unload them later. -m From maurice at snf.stanford.edu Tue Jul 27 11:48:42 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Jul 2004 11:48:42 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-26 17:30:29: failed leak check Message-ID: Adjusted slow pump timer From maurice at snf.stanford.edu Tue Jul 27 11:49:44 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Jul 2004 11:49:44 -0700 Subject: Comment tylanbpsg SNF 2004-07-26 14:08:45: Needs test Message-ID: test complete- green light From maurice at snf.stanford.edu Tue Jul 27 11:50:02 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Jul 2004 11:50:02 -0700 Subject: Shutdown tylanbpsg SNF 2004-07-26 14:10:19: testing process after pull Message-ID: test complete- green light From latta at snf.stanford.edu Wed Jul 28 13:30:47 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jul 2004 13:30:47 -0700 Subject: Problem tylanbpsg SNF 2004-07-28 13:30:46: O2 alarm during venting Message-ID: Reads about 1.3sccm. Yes, written in log book too, by user pethe. From tberg at snf.stanford.edu Fri Jul 30 08:48:59 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 30 Jul 2004 08:48:59 -0700 Subject: Problem tylanbpsg SNF 2004-07-28 13:30:46: O2 alarm during venting Message-ID: rezeroed O2