From mdickey at snf.stanford.edu Tue Jun 1 06:59:48 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Jun 2004 06:59:48 -0700 Subject: Shutdown tylanbpsg 2004-06-01 06:59:47: Broken quartz Message-ID: Tube is down for injector From mdickey at snf.stanford.edu Tue Jun 1 08:44:26 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Jun 2004 08:44:26 -0700 Subject: Shutdown tylanbpsg 2004-06-01 06:59:47: Broken quartz Message-ID: Replaced broken quartzware From mdickey at snf.stanford.edu Tue Jun 1 08:44:40 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Jun 2004 08:44:40 -0700 Subject: Shutdown tylanbpsg 2004-05-31 12:13:39: MFS alarm Message-ID: Pump was off From mdickey at snf.stanford.edu Tue Jun 1 08:45:10 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Jun 2004 08:45:10 -0700 Subject: Shutdown tylanbpsg 2004-06-01 08:45:08: Test Message-ID: Tube needs a test after quartzware replacement From maurice at snf.stanford.edu Tue Jun 1 14:42:13 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 Jun 2004 14:42:13 -0700 Subject: Shutdown tylanbpsg 2004-06-01 08:45:08: Test Message-ID: Test complete. Thanks amyers! -m From ericp at snf.stanford.edu Thu Jun 3 00:22:26 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 3 Jun 2004 00:22:26 -0700 Subject: Problem tylanbpsg 2004-06-03 00:22:25: no dep Message-ID: Ran for 0.5 micron PSG, but only 400A on wafers. MFS alarm, unsure which gas. From ericp at snf.stanford.edu Thu Jun 3 00:24:35 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 3 Jun 2004 00:24:35 -0700 Subject: Comment tylanbpsg 2004-06-03 00:24:34: phosphine flow was low Message-ID: It looks as though the problem reported in the previous report was due to low PH3 flow. From tberg at snf.stanford.edu Tue Jun 8 06:24:43 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Jun 2004 06:24:43 -0700 Subject: Problem tylanbpsg 2004-06-03 00:22:25: no dep Message-ID: checked system all looks ok unable to duplicate problem From tberg at snf.stanford.edu Tue Jun 8 06:25:23 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Jun 2004 06:25:23 -0700 Subject: Comment tylanbpsg 2004-06-03 00:24:34: phosphine flow was low Message-ID: checked flow fine. several runs since no problem From maurice at snf.stanford.edu Tue Jun 15 15:18:04 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 Jun 2004 15:18:04 -0700 Subject: Problem tylanbpsg 2004-06-15 15:18:04: Possible contamination of non-metal side Message-ID: The non-metal side may have been metal contaminated earlier today. From gladys at snf.stanford.edu Wed Jun 16 18:17:10 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 16 Jun 2004 18:17:10 -0700 Subject: Problem tylanbpsg 2004-06-15 15:18:04: Possible contamination of non-metal side Message-ID: nonmetal dummies and boat had been changed. From pethe at snf.stanford.edu Wed Jun 23 11:13:13 2004 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Wed, 23 Jun 2004 11:13:13 -0700 Subject: Problem tylanbpsg SNF 2004-06-23 11:13:06: tube halts and pulls in Message-ID: I noticed that during the pull in of the tube, the motion was not smooth. The tube advances a couple of turns and then halts and advances again. From seymour at snf.stanford.edu Thu Jun 24 10:29:38 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 24 Jun 2004 10:29:38 -0700 Subject: Problem tylanbpsg SNF 2004-06-23 11:13:06: tube halts and pulls in Message-ID: Mike and I replaced the drive motor and checked operation. It runs smooth now. From seymour at snf.stanford.edu Fri Jun 25 10:51:00 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Jun 2004 10:51:00 -0700 Subject: Shutdown tylanbpsg SNF 2004-06-25 10:50:59: not punping down Message-ID: found pump off. tube will not pump down. openingt to check quartz. From mdickey at snf.stanford.edu Fri Jun 25 12:30:41 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 Jun 2004 12:30:41 -0700 Subject: Shutdown tylanbpsg SNF 2004-06-25 10:50:59: not punping down Message-ID: Replaced broken cantilever sheath. Ready for use From beckwith at snf.stanford.edu Tue Jun 29 13:18:44 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Tue, 29 Jun 2004 13:18:44 -0700 Subject: Shutdown tylanbpsg SNF 2004-06-29 13:18:43: high leak rate Message-ID: removed my wafers, left the tube out as per Mike. From seymour at snf.stanford.edu Tue Jun 29 13:23:36 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 29 Jun 2004 13:23:36 -0700 Subject: Comment tylanbpsg SNF 2004-06-29 13:23:35: the tubehas a leak and will not pass leakcheck Message-ID: