From hanjun at snf.stanford.edu Tue Mar 2 15:12:38 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Tue, 2 Mar 2004 15:12:38 -0800 Subject: Comment tylanbpsg 2004-03-02 15:12:37: The tube was found idle @ ATM Message-ID: It seems the previous user loaded the pump recipe but forgot to run it. The tube itself seems running OK. From chion at snf.stanford.edu Tue Mar 9 20:37:27 2004 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Tue, 9 Mar 2004 20:37:27 -0800 Subject: Shutdown tylanbpsg 2004-03-09 20:37:26: failed leak check twice... Message-ID: ..couldn't run pump program also...... ...our wafers are still inside the tube.... From mdickey at snf.stanford.edu Wed Mar 10 07:06:03 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 10 Mar 2004 07:06:03 -0800 Subject: Shutdown tylanbpsg 2004-03-09 20:37:26: failed leak check twice... Message-ID: Replaced broekn t.c. sheath and vacuumed up broken pieces. Back in pump program. From mdickey at snf.stanford.edu Wed Mar 10 07:06:23 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 10 Mar 2004 07:06:23 -0800 Subject: Comment tylanbpsg 2004-03-02 15:12:37: The tube was found idle @ ATM Message-ID: Clear message From tberg at snf.stanford.edu Thu Mar 11 10:35:40 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Mar 2004 10:35:40 -0800 Subject: Shutdown tylanbpsg 2004-03-11 10:35:16: Broken injector on tube Message-ID: Injector on tube broken From maurice at snf.stanford.edu Fri Mar 12 16:53:38 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Mar 2004 16:53:38 -0800 Subject: Shutdown tylanbpsg 2004-03-11 10:35:16: Broken injector on tube Message-ID: Tube pulled and cleaned. Coat failed. Test run dep was not uniform across wafer (because tube not coated). Another test will be run on monday. From maurice at snf.stanford.edu Fri Mar 12 16:55:01 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Mar 2004 16:55:01 -0800 Subject: Problem tylanbpsg 2004-03-12 16:55:01: non uniformity Message-ID: tube not coated before test run another test will be run on monday From maurice at snf.stanford.edu Mon Mar 15 12:06:27 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 15 Mar 2004 12:06:27 -0800 Subject: Problem tylanbpsg 2004-03-12 16:55:01: non uniformity Message-ID: test complete. tube ok. From anayfeh at snf.stanford.edu Mon Mar 29 18:19:39 2004 From: anayfeh at snf.stanford.edu (anayfeh at snf.stanford.edu) Date: Mon, 29 Mar 2004 18:19:39 -0800 Subject: Problem tylanbpsg 2004-03-29 18:19:38: Front Cover Broken-Right Side Message-ID: Upon lifting the cover, the right side of the cover craked. It is theextreme right, should be okay to run. From maurice at snf.stanford.edu Wed Mar 31 10:44:25 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 31 Mar 2004 10:44:25 -0800 Subject: Problem tylanbpsg 2004-03-29 18:19:38: Front Cover Broken-Right Side Message-ID: replaced top cover