From yiching at snf.stanford.edu Thu Nov 11 16:59:28 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Thu, 11 Nov 2004 16:59:28 -0800 Subject: Problem tylanbpsg SNF 2004-11-11 16:59:27: lots of particles in wafer boats Message-ID: There are lots of particles on the bottom of both metal & non-metal sides of the boats. Look like wafer dusts? From mdickey at snf.stanford.edu Fri Nov 12 08:25:28 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 12 Nov 2004 08:25:28 -0800 Subject: Problem tylanbpsg SNF 2004-11-11 16:59:27: lots of particles in wafer boats Message-ID: From parco at snf.stanford.edu Tue Nov 16 12:15:24 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 16 Nov 2004 12:15:24 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-16 12:15:24: base pressure failed x2 Message-ID: base pressure failed x2 From seymour at snf.stanford.edu Wed Nov 17 09:59:05 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Nov 2004 09:59:05 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-16 12:15:24: base pressure failed x2 Message-ID: changed vac pump and did a base pressure test and a leak test and both were good.. From seymour at snf.stanford.edu Wed Nov 17 09:59:41 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Nov 2004 09:59:41 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-17 09:59:40: pump changed Message-ID: to Maurice for release to users. From maurice at snf.stanford.edu Wed Nov 17 10:20:47 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Nov 2004 10:20:47 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-17 09:59:40: pump changed Message-ID: user running test From maurice at snf.stanford.edu Wed Nov 17 10:21:02 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Nov 2004 10:21:02 -0800 Subject: Comment tylanbpsg SNF 2004-11-17 10:21:02: user running test Message-ID: From mdickey at snf.stanford.edu Thu Nov 18 09:56:12 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 18 Nov 2004 09:56:12 -0800 Subject: Comment tylanbpsg SNF 2004-11-18 09:56:12: Pull and clean Message-ID: The LTO/BPSG tube will be going down for a pull and clean on monday morning at 6:00 a.m. on 11/22/04. Down time to be determined. From yiching at snf.stanford.edu Fri Nov 19 15:23:55 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Fri, 19 Nov 2004 15:23:55 -0800 Subject: Comment tylanbpsg SNF 2004-11-19 15:23:54: dummy wafers in rollaround cart were not completely stripped Message-ID: There were not enough clean dummies to fill the boats. From tberg at snf.stanford.edu Mon Nov 22 06:21:38 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Nov 2004 06:21:38 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-22 06:21:37: Routine pull and clean Message-ID: Turned off for pull and clean From maurice at snf.stanford.edu Mon Nov 22 11:06:43 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Nov 2004 11:06:43 -0800 Subject: Comment tylanbpsg SNF 2004-11-17 10:21:02: user running test Message-ID: logged From maurice at snf.stanford.edu Mon Nov 22 11:07:00 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Nov 2004 11:07:00 -0800 Subject: Comment tylanbpsg SNF 2004-11-19 15:23:54: dummy wafers in rollaround cart were not completely stripped Message-ID: logged From maurice at snf.stanford.edu Mon Nov 22 11:07:23 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Nov 2004 11:07:23 -0800 Subject: Comment tylanbpsg SNF 2004-11-22 11:07:23: coating after pull Message-ID: From maurice at snf.stanford.edu Mon Nov 22 14:18:15 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Nov 2004 14:18:15 -0800 Subject: Comment tylanbpsg SNF 2004-11-18 09:56:12: Pull and clean Message-ID: logged From maurice at snf.stanford.edu Mon Nov 22 16:38:37 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Nov 2004 16:38:37 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-22 06:21:37: Routine pull and clean Message-ID: pulled, cleaned, coated test...ok From maurice at snf.stanford.edu Mon Nov 22 16:38:50 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Nov 2004 16:38:50 -0800 Subject: Comment tylanbpsg SNF 2004-11-22 11:07:23: coating after pull Message-ID: logged From bipin at snf.stanford.edu Tue Nov 23 22:51:46 2004 From: bipin at snf.stanford.edu (bipin at snf.stanford.edu) Date: Tue, 23 Nov 2004 22:51:46 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-23 22:51:46: flakes and particles on wafer during dep. Message-ID: Got lot of flakes and particles on the wafers during target 3um (actual 4.3um) deposition using CMOS program. Especially on the first and last dummies ( non-metal and metal side). Have kept the first and another non-metal dummy in the non-metal dummy box and done the same for the last and another metal dummy wafer for inspection. Stripped all the other dummies in 6:1 BOE and replaced the tube with the second set of dummies. From mdickey at snf.stanford.edu Wed Nov 24 09:39:30 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 24 Nov 2004 09:39:30 -0800 Subject: Shutdown tylanbpsg SNF 2004-11-23 22:51:46: flakes and particles on wafer during dep. Message-ID: Vacuumed up loose particles. User will do a test From mdickey at snf.stanford.edu Wed Nov 24 09:39:59 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 24 Nov 2004 09:39:59 -0800 Subject: Problem tylanbpsg SNF 2004-11-24 09:39:58: Test Message-ID: User will run a test after tube and paddle vacuumed out From maurice at snf.stanford.edu Wed Nov 24 13:31:21 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Nov 2004 13:31:21 -0800 Subject: Problem tylanbpsg SNF 2004-11-24 09:39:58: Test Message-ID: