From axiu at snf.stanford.edu  Sat Oct 16 13:46:21 2004
From: axiu at snf.stanford.edu (axiu at snf.stanford.edu)
Date: Sat, 16 Oct 2004 13:46:21 -0700
Subject: Problem tylanbpsg SNF 2004-10-16 13:46:02: step20 to step95(prcpr2000)
Message-ID: <mailman.695.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Mon Oct 18 07:59:37 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 18 Oct 2004 07:59:37 -0700
Subject: Shutdown tylanbpsg SNF 2004-10-18 07:59:36: Pump problem
Message-ID: <mailman.696.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Addressing pump problem



From mdickey at snf.stanford.edu  Mon Oct 18 10:37:17 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 18 Oct 2004 10:37:17 -0700
Subject: Shutdown tylanbpsg SNF 2004-10-18 07:59:36: Pump problem
Message-ID: <mailman.697.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Pump replaced...back for use



From mdickey at snf.stanford.edu  Mon Oct 18 10:37:33 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 18 Oct 2004 10:37:33 -0700
Subject: Problem tylanbpsg SNF 2004-10-16 13:46:02: step20 to step95(prcpr2000)
Message-ID: <mailman.698.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Pump was bad. It has been changed.



From tberg at snf.stanford.edu  Mon Oct 18 10:48:45 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 18 Oct 2004 10:48:45 -0700
Subject: Problem tylanbpsg SNF 2004-10-18 10:48:44: Pump Replaced Needs Test
Message-ID: <mailman.699.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Mon Oct 18 12:16:05 2004
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 18 Oct 2004 12:16:05 -0700
Subject: Problem tylanbpsg SNF 2004-10-18 10:48:44: Pump Replaced Needs Test
Message-ID: <mailman.700.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Pump test complete.
base 11.2
leakback 24.9
Pressure 212.4 during dep...normal



From sanda at snf.stanford.edu  Fri Oct 22 23:45:19 2004
From: sanda at snf.stanford.edu (sanda at snf.stanford.edu)
Date: Fri, 22 Oct 2004 23:45:19 -0700
Subject: Comment tylanbpsg SNF 2004-10-22 23:45:18: not enough dummy wafer
Message-ID: <mailman.701.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

some wafers  are not repalced



From tberg at snf.stanford.edu  Thu Oct 28 05:55:47 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 28 Oct 2004 05:55:47 -0700
Subject: Shutdown tylanbpsg SNF 2004-10-28 05:55:44: Pull and clean
Message-ID: <mailman.702.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Oct 29 06:27:21 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 29 Oct 2004 06:27:21 -0700
Subject: Comment tylanbpsg SNF 2004-10-22 23:45:18: not enough dummy wafer
Message-ID: <mailman.703.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

doen for pull and clean



From mdickey at snf.stanford.edu  Fri Oct 29 11:17:38 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 29 Oct 2004 11:17:38 -0700
Subject: Comment tylanbpsg SNF 2004-10-29 11:17:37: Needs test
Message-ID: <mailman.704.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

Pull and clean is done. Down to Maurice for testing.



From maurice at snf.stanford.edu  Fri Oct 29 15:41:16 2004
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 29 Oct 2004 15:41:16 -0700
Subject: Comment tylanbpsg SNF 2004-10-29 11:17:37: Needs test
Message-ID: <mailman.705.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

test good
green light



From maurice at snf.stanford.edu  Fri Oct 29 15:42:10 2004
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 29 Oct 2004 15:42:10 -0700
Subject: Shutdown tylanbpsg SNF 2004-10-28 05:55:44: Pull and clean
Message-ID: <mailman.706.1357938893.25992.tylanbpsg-pcs@snf.stanford.edu>

test complete