From seymour at snf.stanford.edu Tue Feb 8 11:30:18 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Feb 2005 11:30:18 -0800 Subject: Comment tylanbpsg SNF 2005-02-08 11:30:17: LTO silane flow and temp related leaks Message-ID: I removed Silane from the MFC and introduced N2 for the test. I based the tube and turned on 126 sccm N2 on the N2 Purge MFC. I recorded the tube pressure of 164 mT. I then flowed N2 through the Silane MFC to get the same tube pressure. the silane MFC sho0wed 90 sccm. The correction factor for N2 in a Silane MFc is .600. This would result in 100 sccm . The silane MFC is not flowing excessive amounts to cause the uniformity. The leak rate at 350 was 11 mT/min. After I remped the tube to 450 the leak rate was 118 mT/min. Major outgassing?? Tube has reservations so I could not leave it at 450 to drive out any thing that may cause this outgas situation or temp influenced leak rate doing a 10x jump. From maurice at snf.stanford.edu Wed Feb 9 17:07:48 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2005 17:07:48 -0800 Subject: Comment tylanbpsg SNF 2005-02-09 17:07:47: non metal dummies added Message-ID: 25 non metal dummies were added to the cart. From mdickey at snf.stanford.edu Thu Feb 24 06:06:34 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 24 Feb 2005 06:06:34 -0800 Subject: Shutdown tylanbpsg SNF 2005-02-24 06:06:32: Pull and clean Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Fri Feb 25 09:47:05 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 Feb 2005 09:47:05 -0800 Subject: Comment tylanbpsg SNF 2005-02-25 09:47:05: In coat Message-ID: Pull and clean is done. Currently in coat. Then will need a test. From maurice at snf.stanford.edu Fri Feb 25 15:15:53 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Feb 2005 15:15:53 -0800 Subject: Comment tylanbpsg SNF 2005-02-25 15:15:53: testing after pull and clean Message-ID: From maurice at snf.stanford.edu Fri Feb 25 17:45:33 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Feb 2005 17:45:33 -0800 Subject: Shutdown tylanbpsg SNF 2005-02-24 06:06:32: Pull and clean Message-ID: pulled, cleaned, coated & tested From axiu at snf.stanford.edu Sat Feb 26 20:34:28 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Sat, 26 Feb 2005 20:34:28 -0800 Subject: Problem tylanbpsg SNF 2005-02-26 20:34:27: leakage problem Message-ID: run failed. test pump11. pump down at 10 step but very slow. go back 2000 at 20 step. From tberg at snf.stanford.edu Mon Feb 28 06:39:23 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Feb 2005 06:39:23 -0800 Subject: Comment tylanbpsg SNF 2005-02-09 17:07:47: non metal dummies added Message-ID: noted From tberg at snf.stanford.edu Mon Feb 28 06:39:53 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Feb 2005 06:39:53 -0800 Subject: Comment tylanbpsg SNF 2005-02-08 11:30:17: LTO silane flow and temp related leaks Message-ID: noted From tberg at snf.stanford.edu Mon Feb 28 06:40:07 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Feb 2005 06:40:07 -0800 Subject: Comment tylanbpsg SNF 2005-02-25 09:47:05: In coat Message-ID: completed From tberg at snf.stanford.edu Mon Feb 28 06:40:26 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Feb 2005 06:40:26 -0800 Subject: Comment tylanbpsg SNF 2005-02-25 15:15:53: testing after pull and clean Message-ID: test ok From mdickey at snf.stanford.edu Mon Feb 28 07:09:55 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 28 Feb 2005 07:09:55 -0800 Subject: Problem tylanbpsg SNF 2005-02-26 20:34:27: leakage problem Message-ID: System has a good rate of rise and base pressure, could not duplicate leak problem