From maurice at snf.stanford.edu Wed Jun 1 10:58:10 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Jun 2005 10:58:10 -0700 Subject: Shutdown tylanbpsg SNF 2005-05-31 06:40:27: Pull and clean Message-ID: test complete...good From harshal at snf.stanford.edu Wed Jun 8 23:46:01 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Wed, 8 Jun 2005 23:46:01 -0700 Subject: Problem tylanbpsg SNF 2005-06-08 23:46:00: possible contaminants on top of the boat cover. Message-ID: noticed two patches on top of the boat cover before sending my wafers in the furnace. the patches could be due to accidentally touching the hot boat cover momentarily while removing the cover. the boat is in without the top cover and PUMP 11 program is running. From mdickey at snf.stanford.edu Thu Jun 9 06:31:30 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Jun 2005 06:31:30 -0700 Subject: Problem tylanbpsg SNF 2005-06-08 23:46:00: possible contaminants on top of the boat cover. Message-ID: Top boat has been replaced From hopcroft at snf.stanford.edu Sun Jun 19 18:32:48 2005 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Sun, 19 Jun 2005 18:32:48 -0700 Subject: Problem tylanbpsg SNF 2005-06-19 18:32:47: low silane flow Message-ID: Little or no silane flow- MFC reads 0-25 with repeated errors. Pressure valve on the gas line shows vacuum. Maybe gas line didn't come back after power failure? From mdickey at snf.stanford.edu Mon Jun 20 07:43:44 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Jun 2005 07:43:44 -0700 Subject: Problem tylanbpsg SNF 2005-06-19 18:32:47: low silane flow Message-ID: After power failure valve at bottle closed. Silane back on line From crichter at snf.stanford.edu Mon Jun 27 12:48:09 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 27 Jun 2005 12:48:09 -0700 Subject: Problem tylanbpsg SNF 2005-06-27 12:48:08: MFS ALARM going off periodically while program was running Message-ID: Leak box indicated the following message: PH3 .FNTLK